In this research, the property of polmer thin film on the loading rate effect during nano scraching test is investigated. Three different polymers of monomers (PF, MEH and DB) are tested. The films with three different film thickness, from several dozens to several hundred nm, for each matrial are coated on the glass by using spin-coating. The realationship of lateral force, scratching depth and coefficient of friction with time is discussed by nano-scratching test. The rate of scratching depth is analysed by regression. Consequently, it is clear that the rate of scratching depth is affected by the film thickness and the loading rate. It is hoped that the theoretical model established by this research could be more widely applied to another researches of polymer thin films.