以相位光罩法製程在D型光纖上製作長週期光柵

游紹瑋

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以相位光罩法製程在D型光纖上製作長週期光柵

Using The Phase Mask Method to Fabricate Long-Period Gratings on D-shaped Optical Fiber

游紹瑋 , Masters　　Advisor：何智廷　　

繁體中文

光纖；長週期光柵；相位光罩； Optical fiber ； Long-period Grating ； Phase Mask

Abstract │ Reference (14) │ Altmetrics

Abstract 〈TOP〉

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In this project, we proposed a method to fabricate a D-shaped optical fiber of Long Period surface grating filter component by D-shaped fiber polishing along with E-Gun、photolithography、Phase Mask technologies and etch Copper process.

First , A electron beam is used to evaporate a layer of copper on a silicon wafer, we will do side-polished on multi-mode fiber. The fiber will be precisely stoped polishing until it reaches the core of fiber. Next, we will fabricate the diffraction grating filter component through photolithography process and Phase Mask technologies. It utilizes spinner to spin coating photoresister , and then the Negative photoresist with periodic Long Period surface grating will be fabricated on silicon wafer and then the PDMS material is used to cover the characteristic structure of the package grating.

Finally, we used the ferric chloride solution to the etch Copper and obtain a long period fiber grating sensors. By this method, we can fabricate a low loss transmission whole fibered D-shaped optical fiber grating filter , and reuse Raman original management with the grating diffraction phenomenon of the successful use of optical measurement mechanism, the sheets should force a sense of measure produced a sensitivity for 0.05N of the sensor.

Keywords: Optical fiber、Long-period Grating、Phase Mask technologies

Reference ( 14 ) 〈TOP〉

[1] Nisihhara. H., Y.Handa, T. Suhara, and J. Koyama, “Electron-beam directly written micro gratings for integrated optical circuits,” Proc. SPIE, 239:134, 1980.
連結：
[2] Y. Cheng, T. Huang, C.-C. Chieng, “Thick-film lithography using laser write,” Microsystem Technologies 9 (2002) 17–22 _ Springer-Verlag, 2002.
連結：
[5] Blodgett K. B., 1939, “Use of Interference to Extinguish Reflection of Light From Glass”, Phy. Rev.55, 391.
連結：
[3] Mackenie J. D. and Ulrich D. R. ed., 1990, 11-13 July, SPIE 1328, Sec. 5-7,San Diego.Ca.
[4] Aegorter M. A., Jafelicci Jr. M., Souza D. F. and Zanotto E. D. ed.,1989,“Sol-gel Science and Technology”,World Scientific,London.

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