具光觸媒特性之TNO透明導電膜研究

蔡淑惠

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具光觸媒特性之TNO透明導電膜研究

Research of photocatalytic properties in Nb-doped TiO2 transparent conducting films

蔡淑惠 , Masters　　Advisor：李正中　　

繁體中文

透明導電膜；光觸媒； transparent conducting films ； photocatalytic ； TNO

Abstract │ Reference (180) │ Altmetrics

Abstract 〈TOP〉

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Nb-doped TiO2 (TNO) film is a material with conductivity and
photo-catalytic properties. This research includes two parts, first we investigated
the electrical and optical characteristics of the TNO films. The second part, we
have discussed the photo-catalytic effect. After annealing in vacuum at 370 ℃,
the phase of the deposited TNO film with 90W RF power was transited from
amorphous to anatase The resistivity is about 1.26×10-3 Ω-cm, Hall mobility
is about 1.46 cm2/V-s, and carrier concentration is about 1.89×1021 cm-3, and the
ratio of atom number of titanium and niobium is 6.12. The average
transmittance is about70% and the absorbance is less than 10% in visible
region.
The contact angle of TNO films decreased when the irradiation time
increased, which implies the surface property of TNO films are changed from
hydrophobic to hydrophilic after ultraviolet irradiation. Furthermore, the sheet
resistivity of films is rarely changed under ultraviolet irradiating. For different
niobium concentration TNO films, the methylene blue solution degradation
speed decreased following the sequence of the deposition power, 90W, 95W,
100W, 85W, 80W, which reveals the same tendency of the contact angle
measurement. The higher conductivity, the higher mobility of the carries, and
the photo-excitation of electron-hole pair spreading to the surface faster for the
photocatalytic reaction.

Reference ( 180 ) 〈TOP〉

[2] E. Ahilea and A. A. Hirsch, “Resistance of Thin Metal Films Grown under a
連結：
[4] K. L. Chopra, S. Major, D. K. Pandya, “Transparent conductors—A status
連結：
review”, Thin Solid Films 102 (1983) 1.
連結：
[5] D. S. Ginley and C. Bright, “Transparent conducting oxides”, MRS Bull. 25,
連結：
(2000) 15.
連結：

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