雖然利用WEDG(Wire Electro Discharge Grinding)放電研削加工方法配合OPED(One Pulse Electro Discharge)單發放電,可加工出3次元量測機使用之微細球狀探針,其直徑約40μm左右。但因WEDG放電研削加工法加工效率不高,而且加工更細小電極工具時,容易產生歪斜或斷裂,要加工小於10μm以下之電極工具,仍然相當困難。因此本研究利用電化學加工(Electro chemical machining, ECM)技術,利用電化學腐蝕方式,加工細小微工具,再利用RC檢出放電法成形極小的超微細球狀探針。但電化學加工過程之相關參數,仍有很多未明確。故本研究將利用複合電化學加工研削技術製作微細球狀探針,探討電化學加工對微細球狀探針的影響,加工時間,進給方式及電極旋轉運動的影響,期望提供微細球狀探針製作的可靠參數,提高產品之生產效率及實用性。
Using WEDG(Wire Electro Discharge Grinding) with OPED(One Pulse Electro Discharge) can fabricate micro spherical stylus, which is about 40μm in diameter, for Coordinate Measuring Machine(CMM)to use, but WEDG has low-efficiency grinding, and it is quite challenging to grind small-scale electric tools with diameters below 10μm which is easily slanted or broken during the processing stage。Therefore, this research was experimented with Electrochemical Machining(ECM) technique,at first,micro-scale tool was processed using electrochemical corrosion,secondly,super micro spherical stylus was formed using RC discharge method。 But the process of ECM of relative parameters still remain uncertain。 In this study,micro spherical stylus was made by electrochemical complex machining method,exploring the influence of micro spherical stylus made by ECM of processing time、processing speed and electrode rotational motion,hoping to provide reliable parameters to make micro spherical stylus and increase productivity as well as practicality for products。