Design for Two-Dimensional Precision Stage with Long Stroke, Micro Stepping and Heavy Load Carrying Capacity

大行程、微進給、重承載二維精密工作臺研製

張斌(Bin Zhang) ； 石照耀(Zhao-Yao Shi) ； 林家春(Jia-Chun Lin) ； 張華(Hua Zhang)

《中國機械工程學刊》 34卷1期 (2013/02) Pp. 63-72

摘要

為滿足高精度、重載荷、大行程和微進給的需求，研製了一種採用靜壓氣浮導軌的二維精密工作臺。為減小受重力引起的變形，設計了一真空吸附的封閉式導軌。基於該導軌，構建了共平面H型結構。該工作臺採用直線電機驅動，工件位置由解析度為50 nm的長光柵測定。工作臺行程為320×320 mm，各軸定位精度為±0.928 μm，重複定位精度為±0.323 μm，載荷能力大於50 kg，微進給小於0.5 μm，速度大於3 m/s。該工作臺可用於精密製造和測量。

並列摘要

To meet the need of high accuracy, heavy load capacity, large stroke and micro stepping, a two-dimensional precision stage with aerostatic guideways is developed. To decrease its deformation due to the heavy load, the guideway with a novel structure is designed, which has closed carriage with vacuum preload. Based on the guideway, it is constructed in co-planar H style configuration. The stage is driven by linear motors, and the positions of the workpiece are encoded by length scales with a resolution of 50 nm. The stroke of the stage is 320 × 320 mm. Each axis has a positioning accuracy of ±0.928 μm and a repeatability of ±0.323 μm. The stage has a load capacity of more than 50 kg, a micro stepping of less than 0.5 μm and a speed of more than 3 m/s. It can be applied in precision manufacturing and measuring.

並列關鍵字

precision stage ； aerostatic guideway ； co-planar structure ； heavy load ； micro stepping