The high-tech fabs and equipments inside the Tainan Science Park (TSP) are very sensitive to vibrations during the process of production. Therefore, in-situ measurements for the ground vibrations induced by moving vehicles were conducted at the site of Tainan Science Park in this study. The measurements conducted include the ground vibrations induced by the Taiwan High Speed Rail (THSR) trains and heavy trucks. The characteristics of the ground vibration excited by these two different sources, such as the amplitude, the spectral content, and the attenuation coefficient, were analyzed and compared to show the differences in the ground vibrations induced by different vibration sources at the same site. In addition, possible influences of these vehicle-induced vibrations on the high-tech fabs in TSP were discussed.