Electrochemical polymerization of aniline in H_2SO_4 solution and J:roperties of polyaniline (PAN) have been studied with both in -situ graze ellipsometry and cyclic voltammetry. In the process of electro-polymerization, the current intensities at the oxidation and reduction peaks are proportional to the increment of ellipsometric parameter Δ. The mutation of Δ is corresponding to the thickness of PAN film. The electrochemical behavior of PAN film electrode can be described based on in -situ graze ellipsometri c parameters. Plot of the ellipsometric optical tracking rate (Vop) calculated from Δ and ψ vs. potenti al has revealed that peak of Vop and peak current of the electrochemical reaction appear at the same potential and this ellipsometric parameter (Vop) can be used to determine the electrochemical reaction sensitively.