複合薄膜光學膜擬及特性分析技術

Multilayer Thin Film Simulation and Characterization Technology

林士欽 ； 賴識翔 ； 梁沐旺 ； 王慶鈞 ； 唐謙仁 ； 田春林

《機械工業雜誌》 459期 (2021/06) Pp. 77-85

摘要

光學薄膜濾光片製鍍方式採用混合薄膜技術，除了具有能夠改善單一材料的物理及化學特性外，亦能得到與目標光譜相近之結果。本文介紹多層結構薄膜色度與物理參數變化模擬及鍍膜開發，設計混合薄膜Glass/Cr/AlN/Al/Air結構，主要特點為採用金屬Cr層來控制色度座標中的明亮度（L*），介電層AlN薄膜厚度改變反射光的色彩（a*,b*），以最外層的金屬Al薄膜用來消除穿透光，利用各層結構變化可調控青色、橘色、紫色色度。全介電質膜層堆疊結構採用AlN及SiO_2薄膜材料堆疊，主要特色為膜層結構具有絕緣性，不會影響通訊頻段電磁波的傳輸性，而當入射角大於45度時會發生全反射不會有色彩的變化。

關鍵字

多層薄膜 ； 色度 ； 模擬

並列摘要

The optical thin film filters are prepared using hybrid index films design, which not only improves the physical and chemical properties from a single material, but also achieves results similar to the target spectrum. This study presents development of simulation and coating process, aiming for designing Glass/Cr/AlN/Al/Air structure with various colors and physical parameters. The characteristic design includes the use of metallic Cr layer to control the brightness (L*) in the chromaticity coordinate, the thickness of the dielectric AlN film to alter the color of the reflected light (a*, b*), the outer metallic Al film layer to eliminate penetrating light, and structural changes in each layer to regulate cyan, orange, purple color. The all dielectric-film stack structure uses AlN and SiO_2 film alternating layers. The main feature of the stacking structure is its insulation property, which will not affect the transmission of electromagnetic waves in the communication band. When the incident angle is greater than 45 degrees, it is found that the full reflection will not change color.

並列關鍵字

Multilayer thin films ； Chromaticity ； Simulation

參考文獻

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