鑽石微陣列修整器之製程開發及其特性分析研究

Development in the Manufacturing Process of the Diamond Microarray Dresser and the Analysis of Its Characteristics

施景瑞(Chig-Jui Shih)

指導教授 ： 潘永寧

國立臺灣大學/工學院/機械工程學研究所/博士(2013年)

https://doi.org/10.6342/NTU.2013.10012

摘要

本研究整合微圖樣製程與鎳電鑄製程的技術，搭配具有表面改質的鑽石顆粒(氧化鑽石)作為研磨粒，並開發出具有陣列式之柱狀複合結構的鑽石碟。與市售的鑽石碟比較後，鑽石微陣列修整器在有研磨液的環境下，呈現大約35%的材料移除量且本身有較低的重量損失(18%)。然而在無研磨液的環境下，則呈現約15%的材料移除量，且自身的損失也相對較少。同時所搭配具有氧化端官能基的鑽石將使沈積在周圍的鎳基材有平滑表面結構。因此，鑽石與鎳基材間有較佳的鍵結強度，相對而言，也減少鑽石在研磨過程中有脫落的可能性。
因著整合技術的開發，陣列式之複合結構(鑽石/鎳微柱體)應可提供較大量的工作鑽石，減少分散衝擊力在單一顆鑽石的破壞，同時也提高鑽石碟的使用壽命。這都是透過精準控制鑽石的均勻分佈及鑽石間的高度一致化所得到的結果。除此之外，與硬焊鎳合金比較，電鑄鎳鍍層更適合應用在研磨液的環境下。而且透過低溫的鎳電鑄製程，可有效地避免高溫造成鑽石的石墨化影響。
由實驗結果發現，該整合技術具有簡化製備鑽石碟的流程，並搭配表面修飾的鑽石在不鏽鋼基板上。經過修整測試後，圖樣化的複合結構介於被研磨物與氧化鑽石之間有犁切運動，透過這樣的作用可改善材料移除及延長鑽石碟的使用壽命

關鍵字

表面修飾鑽石 ； 鑽石碟 ； 微圖樣製程 ； 及鎳電鑄

並列摘要

This study demonstrates a combinative method composed of a micro-fabrication and nickel electroforming for fabricating a diamond microarray dresser and utilizing a chemical treatment to realize the oxygenated diamond grits embedded into a nickel micro-column. The diamond microarray consists of the regular arrangement micro-columns, which are addressed with oxygenated diamond grits to acquire sufficient bonding strength via smoothing the deposit surrounding the grits derived from the diamond surface modification. This micro-column (diamond/nickel composite) also provides a high amount of working diamond grits that disperse the impact force on each single diamond grit due to precisely control the uniformity of the distribution and height level of surface-modified diamond grits. By comparing the current commercial dressers, the diamond microarray not only increases to approximately 35% in the material removal rate, but also is maintained a relatively low weight loss in itself (18%). Moreover, similar results were also obtained for the material removal rate (15%) in the case of without CMP slurry. In addition, the Ni deposition is more suitable for use under a corroded environment (e.g. the CMP slurry) as compared with the Ni-based alloy. This manufacturing process has the potential to simplify considerably the fabrication and integration of surface-modified diamond grits on pad dresser-compatible substrates. Consequently, the improvement in the material removal rate and extension of the dresser life are enabled under dressing conditions by a well-patterned micro-column for ploughing action at the interface between the counterpart and oxygenated diamond grits.

並列關鍵字

Surface-modified diamond ； Diamond dresser ； Micro patterning ； Ni electroforming

參考文獻

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