氣囊輪紫外光樹脂滾壓製程技術之研發及應用

Development of a Gasbag-Roller-Assisted UV Imprinting Process and Its Application

吳景棠(Jing-Tang Wu)

指導教授 ： 楊申語

國立臺灣大學/工學院/機械工程學研究所/博士(2010年)

https://doi.org/10.6342/NTU.2010.02209

摘要

為提升滾壓成型過程，模具與基材的接觸面積與均勻接觸壓力，本研究提出一創新型氣囊輪紫外光樹脂滾壓製程。結合紫外光固化成型技術、氣囊輪施壓以及環帶式撓性模具，本製程能將微奈米結構確實快速的複製到塗有紫外光樹脂的塑膠基材上。使用具有強度且適當延展性之矽膠材料，與鋁合金滾筒形成一個腔體，充入適當之氣體壓力後，成為滾動式氣囊輪，施壓於PDMS環帶式撓性模具上。實驗證實，當適當之氣體壓力充入氣囊內部，並以適當之壓力施加於氣囊輪軸上，氣囊輪可使滾壓模具與基材之接觸面積大幅增加；以感壓軟片實驗和數值分析模擬，皆證實氣囊輪確實可有效提升壓力均勻性。即使基材是曲面，其壓力仍均勻。
本研究使用具有微透鏡陣列之PDMS軟模具，成功將微透鏡陣列壓印於PMMA基材上，證實氣囊滾輪紫外光固化滾壓製程之可行性。與剛性滾筒施壓之結果比較，證實增加模具與基材之接觸面積，延長曝光固化時間，可確保結構完全固化成型後再與模具分離。微結構壓印之精度得以提升，甚至壓印速度可以加快。
本研究進一步使用氣囊輪紫外光固化滾壓製程將奈米結構轉印於非平面基材上。奈米結構PDMS模具是以陽極氧化鋁(AAO)結構為母模，經熱壓翻製和PDMS澆鑄後而得。以氣囊輪輔助製程，成功的將AAO奈米結構轉印至PMMA曲面上，經由光譜儀量測反射率證實，在300 nm至800 nm之波長範圍下，具有奈米結構之曲面PMMA基材之光反射率，可降低至2%以下。

關鍵字

氣囊輪 ； 紫外光樹脂 ； 滾壓

並列摘要

This study devoted to developing gasbag-roller-assisted UV imprinting technique and its application. The technique combines UV-based imprinting technique, gasbag-roller press and a belt-type flexible mold, to replicate patterns on the polymer substrate. Polydimethylsiloxane (PDMS) is employed as the material for the belt-type mold. A gasbag-roller is manufactured by wrapping and sealing a silicon tube around an aluminum dumbbell-shaped roller. The gasbag-roller is employed to increase the contact area and to ensure the conformity of contact between the mold and the substrate. The uniform pressure distribution on the substrate has been proven using pressure sensitive films. ANSYS software is also used to simulate the effects of inner gas pressure and pressure applied on the shaft of the gasbag roller. The result proves that contact area is increased and pressure distribution is uniform with aid of gasbag-roller, even when the substrate is non-uniform.
In this study, a gasbag-roller-assisted UV imprinting facility is designed and implemented. Microlens array has been successfully fabricated on the 2 mm-thick PMMA substrate. It proves that gasbag-roller-assisted UV imprinting process is feasible for microstructures replication. Compared with the system with rigid roller press, gasbag-roller can increase the contact area and ensure the conformity of contact between the mold and the substrate. The exposure time can also be prolonged to ensure the complete curing of patterns before detaching from the mold. The gasbag-roller-assisted UV-based imprinting process can increase the rolling speed and the productivity.
The gasbag-roller-assisted UV imprinting system is further employed to replicate nanostructures on the non-planar substrate. Anodic aluminum oxide (AAO) template is embossed on the PC film. PDMS mold with nanostructures is then cast from the AAO template and used as the mold. The results show that AAO nanostructures can be successfully fabricated on the curved surface. The anti-reflection characteristic of nanostructures on the curved surface is measured. The reflectivity of AAO nanostructures on the PMMA curved surface is reduced to below 2 % at wavelength of 300 nm – 800 nm.

並列關鍵字

Gasbag roller ； UV-curable resin ； roller imprinting

參考文獻

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[7]方煌盛，”滾輪式微結構轉印製程開發研究”，國立台灣大學機械工程學研究所碩士論文，民國94年6月

[45]http://www.isin.com.tw (昱辰科技股份有限公司)

[1]張哲豪，流體微熱壓製程開發研究，國立台灣大學博士論文，民國93年6月。