混合氧化鉺與氧化鐿奈米粒子製作旋塗式發光薄膜

Fabrication of Spin-on Luminescence Thin Films Using a mixture of Erbium Oxide and Ytterbium Oxide Nanoparticles

吳宜航(Yi-Hang Wu)

指導教授 ： 林清富

國立臺灣大學/電機資訊學院/光電工程學研究所/碩士(2007年)

https://doi.org/10.6342/NTU.2007.02001

摘要

由於近年來傳輸速度需求的大增，光纖通訊方面的研究便成一項相當重要的
技術，使得鉺離子在近年來被廣泛的研究。同時奈米科技的蓬勃發展，利用奈米粒子的表面特性增加發光效率，對於大量傳輸資料方面，提供一個不同的解決方法。這篇論文提出新的製程方法：使用奈米粒子製作摻鉺發光薄膜，利用奈米粒子混合旋佈玻璃並旋塗於矽基板上。
旋塗的發光層發光波長主要是 1530nm 此波長正好位於光纖通訊的波段。發光層主要的成分為旋佈玻璃與氧化鉺，其中氧化鉺奈米粒子作為鉺離子的來源，而旋佈玻璃廣泛地被運用在半導體製程中，此論文中則是以旋佈玻璃作為宿主材料方便旋塗於矽基板上。除了氧化鉺奈米粒子之外，同時也加入氧化鐿奈米粒子幫助增加發光效率，而氧化鋁奈米粒子與氧化磷的加入可以改善旋塗表面的狀況。除了使用的材料之外，加熱處理過程對於鉺離子的產生也相當重要。發光層表面的狀況與改善方法也提出來討論。而發光層的另一項物理特性，就是上轉換效應（upcoonversion），上轉換發光主要是利用紅外光半導體雷射作為激發源，透過多光子的吸收而使電子躍遷到更高能階放出可見光。在可見光的測量中，將會改變氧化鉺與氧化鐿的含量並觀察可見光的變化，藉此了解鉺離子的特性。
　　與離子佈值、固相磊晶等其他技術比較，新的製造技術簡單低成本，值得做更進一步的研究。

關鍵字

鉺離子 ； 氧化鉺

並列摘要

Because demand for data transmission increase very fast, research of fiber-optic communication becomes an important technology. It makes that Er3+ becomes an attractive issue for researches. Accompanying the blooming research in nanotechnology, many people focus on the surface effect of the nanoparticles and use it to increase emission efficiency. Nanotechnology provides a different way to solve the problem of data transmission. In this thesis, we provide a new .fabrication: using nanoparticles to fabricate erbium doped luminescence thin film. We mix nanoparticles and use spin coating process to deposit it on a silicon wafer.
The emitting layer emits light at 1530 nm which is a important wavelength in optical communication. The main compositions of emitting layer are Er3+ and spin-on glass (SOG). Erbium oxide nanoparticles are the source of Er3+, while SOG is widely used in semiconductor fabrication. We use SOG as host material to spin on silicon wafer in this thesis. We also add ytterbium oxide nanoparticles to increase the luminescence efficiency besides erbium oxide nanoparticles. Aluminum oxide nanoparticles and P2O5 are added to improve the surface condition of emitting layer. Besides using material of the experiment, the annealing process is an important topic and is investigated in this work. The surface condition of emitting layer and improvement will be discussed. Another physical property of emitting layer is upconversion luminescence. We can use near-infrared semiconductor laser to pump the device to produce luminescence. Through the process of multi-photon absorption, the electron can be excited to higher energy levels to produce visible light. In our measurement, we modulate the content of erbium oxide and ytterbium oxide to measure the change of visible light in order to realize the property of Er3+.
Comparing to other kinds of fabrication technology, like ion implantation and solid-phase epitaxy, new fabrication process is much simpler and less cost. This fabricating technique is a promising work and worth developing in the future.

並列關鍵字

erbium ion ； erbium oxide

參考文獻

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