- 學位論文
矽奈米線的定向成長與場效電晶體的製作
The Electric-Field-Directed Growth of SiNW and the Fabrication of SiNW Field Effect Transistor
摘要
本篇論文以VLS 機制於低壓化學氣相沈系統中成長矽奈米線(SiNW)。其次，在成長過程中外加電場來達到定位、定向的效果。最後，我們成功利用矽奈米線製備不摻雜和P 型場效電晶體，並量測矽奈米線場效電晶體的各種電性加以比較。
關鍵字
矽奈米線並列摘要
The growth of silicon nanowires (SiNWs) with different diameters of Au nanoparticles as catalyst has been systematically investigated via vapor-liquid-solid (VLS) mechanism using the low pressure chemical vapor deposition. The electric-field-directed growth SiNWs were developed to orient the SiNW to grow in a fixed direction and to the designed position by Coulomb electric force. The SiNWs FET was fabricated successfully. Single crystal undoped and p-type SiNWs have been prepared and characterized by current-voltage measurements.
並列關鍵字
SiNW參考文獻
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Engineering
延伸閱讀
- 陳瑞麟（2005）。矽奈米線場效電晶體之研製〔碩士論文，國立臺灣大學〕。華藝線上圖書館。https://doi.org/10.6342/NTU.2005.01038
- Su, C. Z. (2018). 矽奈米線場效電晶體的雜訊研究 [master's thesis, National Chiao Tung University]. Airiti Library. https://www.airitilibrary.com/Article/Detail?DocID=U0030-0205201911222047
- Kakkerla, R. K. (2018). 低功率應用之三五族異質結構奈米線於(111)矽基板的磊晶成長與特性分析 [doctoral dissertation, National Chiao Tung University]. Airiti Library. https://www.airitilibrary.com/Article/Detail?DocID=U0030-0205201911253861
- 周韋邑（2015）。準直矽化物奈米管陣列、超薄矽晶圓與矽單晶奈米線陣列轉附製程之研究〔碩士論文，國立中央大學〕。華藝線上圖書館。https://www.airitilibrary.com/Article/Detail?DocID=U0031-0412201512093787
- 曾柏元（2015）。Fabrication of Graphene/Zinc Oxide Junction Field Effect Transistor with High On-off Ratio and High Mobility〔碩士論文，國立清華大學〕。華藝線上圖書館。https://doi.org/10.6843/NTHU.2015.00216