本研究選用氧化鋅(ZnO)、氮氧化銦(InNO)與鉛酞菁(PbPc)三種材料,作為光伏元件之主要結構。因三種材料的吸收波段可涵蓋可見光波長範圍,提高元件入射光通量。在結構上,氮氧化銦以斜向沉積(Glancing-Angle Deposition, GLAD)技術,成長出非均向性奈米柱狀結構,具有高孔洞、高表面粗糙度等特性,增加光的入射量與利用率,藉此提高有機層的吸收效率,達到減低光損耗率。因此將鋁膜以陽極氧化鋁技術,使鋁膜表面成為奈米孔洞型態,藉由多孔性及高表面性來吸附染料,提高鉛酞菁與鋁膜的接觸面積。從SEM圖結果顯示,鋁膜蝕刻時間增加孔洞愈大深度越深,而光電轉換效率可達0.0102%;相較於未蝕刻過的鋁膜,光電轉換效率只有6.62×10-5%,從結果顯示增加鉛酞菁與鋁膜表面積,確實有助於元件效率的提升。此外加入金奈米粒子(Gold Nano-particle, GNPs)後有效的將鉛酞菁激子被引流出,使效率提升為0.0106%。在0°沉積的氮氧化銦效率為0.00415%;40°斜向沉積的氮氧化銦光電轉換效率可達0.0133%,顯示具有非均向性奈米柱狀結構有助於元件提升轉換效率。
In this study, we used zinc oxide, induim oxynitride and lead Phthalocyanine of three materials, to construct the main structure of the photovoltaic devices. Therefore, the absorption spectra of these three materials can cover the visible wavelength range and can increase incident light flux into the device. In order to construct the structure of the photovoltaic devices, we utilize glancing-angle technique to deposit the anisotropic nano-rods structure for InNO film. This anisotropic nano-rods structure for InNO film with a high pore, high surface roughness and other characteristic is quite useful to trap more the incident light energy and light utilization. Therefore this anisotropic nano-rods structure for InNO film enhances the absorption efficiency of organic layer and reduces the optical loss rate. Furthermore, the flat surface of Al film is modified to a nano-porous surface morphology. The porosity of the Al film increases the surface area that is useful for adsorbing dye and improves contact between the PbPc and Al surface. The SEM data reveal different structures of nano-porous morphology, dopant gold-nano particle in the solutions and 40° nanostructure of InNO. Hence each of these three strutures can reach larger power conversion efficiency of 0.0102%, 0.0106%, and 0.0133%, respectively. We believe that anisotropic nano-rods structure for InNO film is capable to enhance the power conversion efficiency.