利用奈米球微影術製作類鑽石圖案化結構及探討其疏水性與光學性質

A Study of Hydrophobic and Optical Properties of Diamond-Like Carbon Films with Novel Patterns Structure Using Nanosphere Lithography.

陳靖霖(Ching-Ling Chen)

指導教授 ： 林啟瑞 ； 魏大華

國立臺北科技大學/機電學院/機電整合研究所/碩士(2011年)

摘要

奈米球微影術，乃是利用自組裝之方式，在基板上堆疊出六方緊密週期排列奈米球，其可以把奈米球當作類似光阻之遮罩功能，並可藉由選擇奈米球大小來控制其週期尺寸。本研究藉由奈米球微影術之方式，首先在矽晶圓（100）上以旋轉塗佈法堆疊出大面積緊密排列的單層奈米球陣列，再以RF磁控濺鍍法沉積類鑽碳(DLC)膜，以形成二維類鑽碳(2-D DLC)薄膜陣列，此類鑽碳膜陣列經潤濕特性測量，可得最高接觸角為118.63°，相較於未鍍膜之接觸角46.41°，提升了155.6％，明顯提高了疏水特性。緊接著，以反射光譜儀探討類鑽碳膜陣列之光學特性，在可見光波段皆有抗反射效果，其反射率由原本的40~50％下降至1％左右，有效地降低其反射率，可應用在抗反射膜之製作。而在三維光子晶體方面，本研究利用DLC膜成功地製作三維反蛋白石光子晶體結構，並探討三維DLC膜結構反射率與光子能隙(PBG)之現象，發現此三維結構有光學濾波效果，可應用於光學濾光片與光學元件上。最後，將利用奈米球微影技術，經反應式離子蝕刻機(RIE)蝕刻不同粒徑奈米球，控制其Ar/CF4/O2混合氣體流量比例5/5/5 sccm，成功地製作出奈米矽圓柱(Nanocolumns)與奈米矽圓錐(Nanocones)陣列，可應用於太陽能電池、場發射顯示器、場效電晶體與光學元件上。

關鍵字

奈米球微影術 ； 類鑽石 ； 疏水性 ； 光子晶體 ； 奈米矽圓柱

並列摘要

Nanosphere lithography (NSL) has potential applications in many areas, which uses self-assembled polystyrene (PS) colloidal monolayer as templates. In this study, polystyrene nanoparticles previously were first coated onto silicon wafer (100) to form a layer of hexagonal closed-packaged structure. RF magnetron sputtering then was employed to grow two-dimensional diamond-like carbon (2-D DLC) arrays. The contact angle analysis revealed that the hydrophobic have been significant improved, as increased by 155.6% (118.63°and 46.41° for the 2-D DLC arrays and uncoated Si substrate, respectively). In addition, the reflectance of as-grown 2-D DLC arrays has decreased to 1% and open an great applications potential in anti-reflectance (AR) coating. Moreover, three-dimensional (3-D) photonic crystal was successfully produced through using DLC films to fabricate three-dimensional inverse opal structures. Optical properties of those 3-D photonic crystals were investigated, and high reflectance of 3-D DLC inverse opal was obtained.
Besides, we have developed a novel method to produce vertical arrays silicon nanocolumns and nanocones by NSL and etching with Ar/CF4/O2 gases mixture ratio 5/5/5 sccm. The results indeed open up avenues for applications in solar cells, field emission, and optical devices.

並列關鍵字

Nanosphere Lithography ； DLC ； Photonic Crystals ； Hydrophobic ； Nanopillars

參考文獻

[1] S. Aisenberg and R. Chabot, “Ion-beam deposition of thin films of diamondlike carbon,” Journal of Applied Physics, vol. 42, no. 7, 1971, pp. 2953-2958.

[2] Holland, L., Ojha, S.M, “Deposition of hard and insulating carbonaceous films on an r.f. target in a butane plasma,” Thin Solid Films. vol. 38, no. 2, 1976, pp. 17-19.

[3] Angus, J.C., Hayman, C.C, “Low-pressure, metastable growth of diamond and "diamondlike" phases”, Science, Vol 241, no. 4868, 1988, pp. 913-921.

[4] J. Robertson, “The deposition mechanism of diamond-like a-C and a-C：H,” Diamond and Related Materials,.Diamond and Related Materials, vol. 3, 1994, pp.361-368.

[6] 林啟瑞、張建國，低成本奈米鑽石粉末製造與應用於抗反射及疏水/疏油行為之研究，台灣製造工程與自動化科技協會，2010年。