含氮類鑽石之成長、特性及應用於抗腐蝕與生醫材料之研究

A Study on Synthesis and Characteristics of Nitrogen-Doped Diamond-Like Carbon for Corrosion Resistance and Biomaterial Applications

沈宥瑞(You-Ruey Shen)

指導教授 ： 林啟瑞 ； 魏大華

國立臺北科技大學/機電學院/機電整合研究所/碩士(2011年)

摘要

類鑽石薄膜在許多應用上為最佳的材料，主要是其本身具備高的硬度、高光穿透、高電阻抗、化學惰性及低摩擦係數。此外，上述所提及之類鑽石薄膜特性可經由元素的摻雜達到提升的效果，尤其是生物相容性與血液相容性之優異表現。
在本論文之研究以R.F.非平衡磁控濺鍍系統於矽基板上沉積類鑽石薄膜與含氮類鑽石薄膜。製程中討論R.F.功率、工作壓力、沉積時間及氮氣濃度等參數對薄膜內sp3/sp2比例之調控，並且從研究中發現薄膜之表面微結構、粗糙度、潤濕性、ID/IG比值、化學惰性及生物相容性均明顯受到影響。
觀察中發現氮氣的摻雜明顯提高薄膜表面粗糙度(RMS 0.378 nm ~ 2.679 nm) 、潤濕性(接觸角 84.04° ~ 44.58°)、與基板附著力(薄膜破壞韌性2.19 MPa√m )、腐蝕阻抗(於0.6 M氯化鈉溶液之腐蝕電流密度為3.14×10-6 A/cm2；於仿人體體液的HBSS溶液之腐蝕電流密度為2.93×10-8 A/cm2)及生物相容性。以MTT測試Si基板、白金薄膜、類鑽石薄膜與含氮類鑽石薄膜對L929細胞是否產生毒性，其結果顯示類鑽石薄膜與含氮類鑽石薄膜均有較低的毒性產生，其中以生物相容性較高之含氮類鑽石薄膜具有更低之細胞毒性。在體外培養L929細胞與MG63細胞1天與3天，以氮氣濃度5 %所沉積之類鑽石薄膜具有最多的細胞數量。

關鍵字

含氮類鑽石 ； 循環伏安法 ； 抗腐蝕 ； 生物相容性 ； 細胞螢光染色

並列摘要

Diamond-like carbon (DLC) films are one of the best materials for many applications due to their high hardness, high optical transparency, high electrical resistance, chemical inertness, and low coefficient of friction. Also, it is well known that modified DLC films with doped element would enhance those characteristics mentioned above, especially ensure high bio/haemo-compatible.
In this study, DLC and nitrogen-doped DLC (DLC: N) thin films were deposited onto silicon substrate by R.F. unbalance magnetron sputtering technique. The sp3/sp2 ratio of as-deposited DLC films and DLC: N thin films could be controlled by R.F. power, working pressure, deposition time, and nitrogen concentration. It is shown that these parameters had significant effects on surface microstructure, roughness, wettability, ID/IG ratio, chemical inertness, and biocompatibility.
Nitrogen doped has been observed to significantly improve surface roughness (RMS 0.378 nm ~ 2.679 nm), wettability (contact angle 84.04° ~ 44.58°), adhesion on substrate (2.19 MPa√m of fracture toughness), and corrosion resistant (in 0.6 M NaCl solutions: 3.14×10-6 A/cm2. in HBSS solutions: 2.93×10-8 A/cm2). The cytotoxic effects of Si substrate, Pt, DLC and DLC: N thin films were investigated using MTT (3-(4,5-dimethylthiazol-2-yl)-2,5-diphenyl tetrazolium bromide) tests with L929 cells. Extremely low toxicity was observed in as-deposited diamond-like carbon films. Moreover, lowest toxicity from DLC: N thin films revealed nitrogen doping had significant effects on biocompatibility of DLC films. In vitro tests, which arranged using L929 and MG63 cell lines during 1 and 3 days, revealed that the cell numbers were significantly greater for the DLC: N films doping with 5% N2.

並列關鍵字

Nitrogen-doped Diamond-like carbon ； Cyclic voltammograms ； Biocorrosion resistance ； Biocompatibility ； Cells staining

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