利用MEMS微針陣列設計與製作經皮生物傳感器

Design and Fabrication of MEMS micro-needle array as a Transdermal Sensor by MEMS Processes

蔡昌峰(Chang-Feng Tsai)

指導教授 ： 呂志誠

國立臺北科技大學/機電學院/機電整合研究所/碩士(2012年)

摘要

本研究主要研究一種利用經皮探針陣列，建立起一奈微生醫感測器平台，透過角質層下組織液的成分量測，進行例如血糖值、體溫、GOD、GDP等監測，本研究成功製備出直徑小於150μm微探針，高度約在350~500μm之間，微針頭陣列主要是以PCB版為基板，利用黃光微影製程於晶圓表面定義光阻圖形後，利用電鑄方是製造出鎳針後，在鎳針表面利用化學度的方式將表面完全包覆金，使鎳針具備高度生物相容性，利用MEMS製程設計出可監測人體間值液(ISF)之經皮感測生物感測器，人體間值液(ISF)可以提供各項人體狀況已供後端如醫生等做監測，此研究觀念過於廣泛，因此縮小研究目標，首先利用監測血糖濃度變化值，證明系統可行性，利用 PCB板組裝黃光微影製程設計與製造出之微針，輔以伏安循環法(Cyclic Voltammetry)檢測出感測前後間值液中血糖值改變量，將量測變化之訊號值與後端電路連接後，進行更進一步的判別與辨識。
血糖值監測系統還存在許多缺點極需改善，包括準確度、連續監測、侵入式監測、使用採血針帶來的痛感造成使用者恐懼與排斥的心理等，市面上常見針頭一般為#22或#25，外徑分別為0.71mm與0.51mm，當進行採血將針頭刺入人體表皮層時，會給使用者帶來痛感，研究顯示注射所引致的皮膚痛感，會隨著注射針頭直徑的縮小而大幅降低，最後猶如蚊蟲叮咬之微弱痛感而已。此外將葡萄糖氧化酶(GOD)等監測藥物塗佈於微針尖表面，利用組織液進行各類如血糖值的感測。

關鍵字

MEMS 透皮吸收傳感器 ； 葡萄糖量測 ； 微針陣列

並列摘要

In this study, an MEMS was designed for human body to measure the blood glucose level in the interstitial fluid (ISF) by electrochemical sensing along with PCB board assembled by photolithography process. The micro-needle was fabricated and coated with Au and the surface coating was verified by Scanning Electron Microscopy. The enzyme immobilized Au-Microneedle was tested by Cyclic Voltammetry with and without glucose solution, The electrochemically sensed glucose level data is then transferred through back-end circuit connection and wirelessly for further action.
So far, there are still many shortcomings in dire need of improvement in the value of blood glucose monitoring system. Use the lancets got blood will bring the pain、fear and exclusion for the patient. general common market needle is no.22 or no.25. the needle outer diameter is 0.71mm and 0.51mm. respectively, when the patient use lancets penetrate the human epidermis will force the patient pain and fear. studies have shown that injection of the skin caused by pain, as the needle diameterreduced substantially reduced, and finally weak pain as if the mosquito bites.

並列關鍵字

MEMS ； Transdermal sensor ； glucose ； micro-needles

參考文獻

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