應用基因演算法之系統鑑別於線性平台的精密定位控制

Precision Positioning Control of Linear Stage Using System identification Based aaaaa on Genetic Algorithm

田昀錚(Yun-Cheng Tian)

指導教授 ： 林志哲

國立臺北科技大學/機電學院/自動化科技研究所/碩士(2011年)

摘要

近年來生產高速化、高精度已成為半導體、光電等產業的必然趨勢。然而在生產設備中搭配使用線性馬達系統亦成為世界各大機械設備商的主流技術，進而滿足工業界要求著重在高速、高精度生產之應用。本文主要探討應用基因演算法之系統鑑別於線性馬達平台，並且配合干擾觀測器與順滑控制器設計，對於實驗系統-線性馬達平台的定位精度表現。我們並利用傳統控制器與所提之干擾觀測器及順滑模態控制器在實際平台上實現，且作精密定位應用上之比較。最後實驗結果可以證明提出該順滑模態控制方法在平台實際定位應用上具有效降低誤差、強健性及消除干擾的特性。

關鍵字

線性馬達 ； 基因演算法 ； 可變結構控制 ； 干擾觀測器

並列摘要

In recent years, high-speed and high-accuracy productions are inevitable trend in semiconductor, optoelectronics, and other industries. Therefore, using the linear motor systems in manufacturing equipments, which is able to satisfy industries requirements for high-speed/high-accuracy productions and applications, has become dominant technology to the world’s leading providers of machinery and equipment. This article presents using system identification based on the linear motor, a controller design base on disturbance observer and sliding mode controller with the identified result, and discusses the controller’s performance of positioning accuracy in experimental machine tool table - gantry-typed linear motor system. Furthermore, we also made the traditional controllers and the sliding mode controller to be applied in real system environment, and compare performances of positioning application comparison. Finally, the sliding mode control method can be proved to reduce steady state error effectively by the experimental results, which is able to eliminate disturbance and to show the robustness in the gantry-typed linear motor system with precision positioning applications.

並列關鍵字

Genetic Algorithm ； Variable structure control ； Disturbance observer

參考文獻

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