反應磁控濺鍍氧化鎳釩薄膜之電致變色特性研究

Investigation of Electrochromic Properties of Nickel-Vanadium Oxide Films Prepared by Reactive Magnetron Sputtering

謝一全(Yi-Chueh Shieh)

指導教授 ： 陳適範 ； 黃國修

國立臺北科技大學/機電學院/車輛工程系所/碩士(2008年)

https://doi.org/10.6841/NTUT.2008.00607

摘要

薄膜光學技術一直是世界各國極力研發的重點項目，其中電致變色技術更被視為可廣泛應用於民生產業的明日之星，而近年來電致變色系統主要發展的方向，主要應用於汽車玻璃和建築物的景觀玻璃上，製備可調節光通量和控制熱負荷之智慧型窗戶，或以低電壓驅動顯示系統及特殊濾光片，達到降低耗能及節省成本等特點。
實驗結果發現，穿透率變化量(△T)與薄膜中的氧含量並無顯著的差異，而與氧化鎳釩薄膜中+2與+3價的混合價態含量有較高的關連性。當薄膜中+2與+3價的混合價態含量增加，著色效率隨之提升，當工作氣體氧含量為66.67%時，為最佳的濺鍍製程參數，在550nm波長下的薄膜著色效率可以達到CE= 32.03 cm2/C。薄膜經過400℃退火後，會隨著薄膜內氧原子含量減少，光能隙由3.99eV下降到3.89eV，因為薄膜內的氧空孔增加，造成導帶與價帶間的距離變小導致光能隙窄化。

關鍵字

電致變色 ； 直流反應磁控濺鍍法 ； 氧化鎳釩 ； 橢圓偏振術 ； 光學常數

並列摘要

Electrochromic technology has been widely used for general applications to daily life. Novel development of electrochromic system has been made on the applications of automobile windshield and architecture windows. The smart windows can modulate light flux and control heat loadings. Applications on low power monitor or specialty filters also provide solutions for energy and cost cut.
In this study, the valence mixture of nickel in Ni-V oxide films appears to affect the change of transmission rate (△T) more than oxygen concentration in the oxide thin films. The concentration of +2 and +3 valence mixture increases coloration efficiency. Films made by an optimum sputtering working atmosphere of 66.67% oxygen content demonstrate coloration efficiency of CE= 32.03 cm2/C at 550nm wavelength. After annealing at 400℃, oxygen content in the film appears to reduce. The optical band gap also reduces from 3.99eV to 3.89eV. It is proposed that the increase of oxygen vacancies causes the valence band and conduction band to approach and thus narrow the optical band gap.

並列關鍵字

Electrochromic ； DC reactive magnetron sputtering ； Nickel Vanadium Oxide ； Ellipsometry ； Optical constant

參考文獻

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