鼓膜測試、奈米拉伸、與奈米壓痕量測薄膜機械性質之研究與比較

鼓膜測試為計算薄膜機械性質之簡易方法之一。本文提出新式鼓膜測試之金屬與氮化矽圓形薄膜製程，成功結合離子反應性深蝕刻與氟化氙氣體等乾蝕刻機制釋放薄膜結構。氮化矽薄膜作為保護金屬薄膜之犧牲層；同時也藉由改變氟化氙氣體之參數製作出氮化矽懸浮薄膜。在應用上，圓形的金、鋁及氮化矽等薄膜成功利用此一方法製作，且透過自行架設之鼓膜系統量測計算薄膜之楊氏模數，並與奈米壓痕之量測比較有近似之結果。為了瞭解奈米拉伸與奈米壓痕量測系統之不確定度，採用ISO GUN規範計算系統的不確定度。標準質量法碼用來校正系統的力量不確定度。此外，光學干涉儀則用來計算系統測長不確定度。此研究可作為在執行薄膜機械性質量測系統不確定度之基礎。更進一步，透過經校正之測試系統研究聚二甲基矽氧烷與奈米碳管複合薄膜之靜態與動態機械性質。為避免團聚效應，透過超音波儀器攪拌複合材料，利用經校正之最大力量為500 mN與行程位移150 mm之奈米拉伸量測系統進行薄膜材料機械性質之量測。複合薄膜動態機械性質如儲存模數與損耗模數亦能藉由此系統獲得，儲存模數隨著碳管含量與頻率增加而提高。最後，奈米壓痕系統用來量測聚二甲基矽氧烷與其結合奈米碳管之複合薄膜機械性質，利用奈米拉伸與壓痕量測複合薄膜之楊氏模數增量有近似之結果。

關鍵字

鼓膜測試；奈米壓痕；奈米拉伸測試

並列摘要

The bulge test is a convenient approach to determine the thin film mechanical properties. This study presents a fabrication process to prepare the circular membrane made of metal as well as dielectric films for bulge test. The process successfully combines the dry etching of DRIE and XeF2 to release the test metal films. The Si3N4 film is used to protect the metal layers during the release process. By changing the recipe of XeF2 etching, the circular Si3N4 test membrane can also be fabricated. In applications, the circular membranes of Al, Au, and Si3N4 films were successfully prepared using the present approach. By using these specimens, the bulge test designed in this work was used to determine the thin film Young's modulus. The results by the bulge test show the similar trend with the results obtained by nanoindentation test. To find out the measurement ability of force and displacement of nano tensile tester and nanoindentation system, we adopted the method suggested in ISO GUN to calculate the uncertainty of this system. The standard weights are used to calibrate the force of the testing system. In addition, an optical method is adopted to evaluate the displacement uncertainty of the system. This research can be used as the basis for calculating measurement uncertainty in performing material tests. Moreover, this study is to investigate the static and dynamic mechanical properties of polydimethylsiloxane (PDMS) and the mixture of PDMS and carbon nanotubes. The PDMS/CNTs nanocomposites were stirred by an ultrasonic instrument to prevent agglomerations. A calibrated nano tensile tester was adopted in this testing system with maximum load of 500 mN and crosshead extension of 150 mm. The dynamic properties of PDMS/CNTs nanocomposites such as storage and loss modulus can be obtained by this system. The storage modulus increased with the CNTs content and also with the higher frequencies. Finally, the nanoindentation measurement system was employed to characterize the mechanical properties of PDMS and PDMS/CNTs. The increase of Young’s modulus by nanoindentation test has the similar trend with the results obtained by the tensile test method.

並列關鍵字

Bulge test ； Nanoindentation ； Nano tensile tester

參考文獻

1.R. P. Feynman, “There’s plenty of room at the bottom,” Journal of Microelectromechanical System, Vol.1, No.1, March 1992

2.W. N. Findley, J. S. Lai and K. Onaran, “Creep and relaxation of nonlinear viscoelastic materials with an introduction to linear viscoelasticity,” North-Holland Publishing Company, 1976

4.W. D. Nix, “Mechanical properties of thin films,” Metallurgical Transactions A, Vol.20A, No.11, pp.2217-2245, 1989

5.J. A. Schweitz, “Mechanical characterization of thin films by micromechanical techniques,” MRS Bulletin, Vol.17, No.7, pp.34-45, 1992

7.A. Llzhofer, H. Schneider and C. Tsakmakies, “Tensile testing device for microstructured specimens,” Microsystem Technologies, Vol.4, pp.46-50, 1997

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鼓膜測試、奈米拉伸、與奈米壓痕量測薄膜機械性質之研究與比較

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