表面聲波氣體感測電路之可靠度

本研究利用壓電材質之氣體表面聲波元件與振盪器來進行實驗，並且詳細地呈現整個可靠度測試流程。目前的研究是利用美國軍規810G的測試標準進行不同參數的測試，包含冷熱衝擊測試、不開機模式進行溫度與濕度測試、開機模式進行溫度與濕度測試，和加速壽命測試的平均故障間隔來評估其可靠度。結果顯示，在百分之八十和九十的信心水準下得到478.02和559.71小時的可靠度的結果。而本研究模擬出量產後的氣體感測元件，在產品在經過長時間使用後的可靠度壽命測試。利用此標準測試方法來測試元件的可靠度是一種可靠與有效的分析方法。這些結果可以建立一個有效的資料庫以供未來製造氣體聲波元件的設計準則。

關鍵字

表面聲波；氣體；可靠度

並列摘要

Applying surface acoustic wave (SAW) devices for the gas sensor has drawn much attention for its high sensitivity and thermal stability. In this work, we developed gas sensors using SAW oscillators and mixers. The industrial standard tests have been performed for SAW sensor reliability. The study explored different conditions using the testing standard MIL-STD-810G, including thermal shock test, temperature and humidity test non-operation, temperature and humidity test operation, and mean time between failures. Among different parameters tested, the experimental results reveal that reliable operation times at confidence levels of 80% and 90% are 478.02 hours and 559.71 hours respectively. We have demonstrated the preliminary reliability performance of SAW gas sensors using industrial reliability test standard. These results can be very beneficial for the design and mass production of SAW gas sensors.

並列關鍵字

SAW ； Gas ； Reliability

參考文獻

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[7] M. S. Nieuwenhuizen and A. W. Barendsz, “Processes involved at the chemical interface of a SAW chemosensor,” Sensors and Actuators, vol. 11, pp. 45-62, 1987.

國際替代計量

表面聲波氣體感測電路之可靠度

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