使用標準CMOS MEMS製程之電容式微水平儀設計

Design of capacitive micro tilt sensor in standard CMOS-MEMS process

白家豪(Jia-Hao Bai)

指導教授 ： 許孟烈

國立暨南國際大學/科技學院/電機工程學系/碩士(2010年)

https://doi.org/10.6837/NCNU.2010.00233

摘要

水平感測器是工程中常見的測量工具，在營建、航太、機械、半導體、化學與生醫工程等領域都有其應用，但一般工程用的水平感測器並不適合使用在可攜式產品的應用中，因此微小尺寸的水平感測元件也因應而生。
在本論文中，我們將會討論一架構簡單、耐用、低成本的微流道電容式水平感測器之整合設計。結構部分是在積體電路晶片中實現一微流道感測電容，藉由微流道中液體流動時所造成的電容變化來感測水平狀態，經由讀取電路將水平感測結果輸出。
本論文採用國家晶片系統設計中心所提供的0.35μm CMOS MEMS製程進行晶片實作與測試，晶片面積為1400μm × 1500μm。感測器讀取電路操作時脈為100KHz，電源為3.3V單電源，可讀取感測電容20fF至200fF變化，對應的電壓輸出範圍為2.18V至0.84V，功率消耗為0.13mW。

關鍵字

微機電 ； 微流道 ； 水平感測器

並列摘要

Tilt sensor is a common measurement tool used in construction, aerospace, machinery, semiconductor, chemical and biomedical engineering and a variety of applications. However, the general tilt sensors used in engineering are not suitable for use in portable products, and therefore the small size tilt sensor is needed.
In this paper, a simple, durable and low-cost capacitive micro-channel tilt sensor in CMOS-MEMS is proposed. A micro-channel capacitor on CMOS chip to sense the level through the capacitive change caused by fluid flow to sensing the level, and the readout circuit to construct a capacitive micro tilt sensor is implemented in TSMC 0.35μm CMOS-MEMS technology provided by National Chip Implementation Center. The chip area is 1400μm × 1500μm. The chip works at 3.3V power supply and operates at 100KHz clock rate. Capacitance value from 20fF to 200fF can be sensed, corresponding analog output voltage is from 2.18V to 0.84V. The overall power consumption is 0.13mW.

並列關鍵字

CMOS-MEMS ； Micro-channel ； Tilt sensor

參考文獻

[1] 林宣樂, 影像感測器於水平測量之應用, 國立中央大學-光電科學研究所碩士論文, 2005.

[2] D. Rongching, R. B. Stein, B. J. Andrews, K. B. James and M. Wieler, "Application of tilt sensors in functional electrical stimulation," IEEE Transactions on Rehabilitation Engineering, Volume 4, Issue 2, Pages 63-72, 1996.

[3] L. Guo, Q. Liao, S. Wei, "Design of a novel biomimetic tilt sensor based on variable reluctive transducer," International Electronic Measurement & Instruments Conference, Pages 1-350 - 1-354, 2009.

[4] T. G. Constandinou, J. Georgiou and C. Andreou, "An ultra-low-power micro-optoelectromechanical tilt sensor," IEEE International Symposium on Circuits and Systems, Pages: 3158 – 3161, 2008.

[5] D.H. Jeong, S.S. Yun, M.L. Lee, G. Hwang, C.A. Choi, J.H. Lee, "Novel Micro Capacitive Inclinometer with Oblique Comb Electrode and Suspension Spring Aligned Parallel to {111} Vertical Planes of (110) Silicon," International Micro Electro Mechanical Systems Conference, Pages 797-800, 2009.