本論文主要是研究以簡單複製製程來製作高分子波長濾波器。在此研究裡,將以全像術干涉技術和微模轉印技術在高分子上製作光柵結構。接著高分子波長濾波器將由兩階段微模技術來製作,主要的模仁將先在負光阻上形成,然後再將其模型轉移到PDMS模仁上;在這步驟之後,將以PDMS高分子濾波器的模型(pattern)轉印至高分子上。此翻模技術可達到大量生產的效果及製作出低損耗的高分子光波導元件,其光學傳輸特性可由Tunable Laser頻譜分析儀所量測得知。
Abstract This thesis describes a procedure to replicate a polymeric wavelength filter. In this work, the grating structure on a polymer is fabricated first using holographic interferometry and micro-molding processes. The polymeric wavelength filters are produced by a two-step molding process where the master mold is first formed on a negative tone photoresist and subsequently transferred to a PDMS mold; following this step, the PDMS silicon rubber mold was used as a stamp to transfer the pattern of the polymeric wavelength filters onto a UV cure epoxy. Initial results show good pattern transfer in physical shape. Use soft molding techniques to fabricate the low loss polymer optical waveguides and Large Scale production. The optical transmission characteristics were measured in terms of Tunable Laser spectrum analyzer. The grating profiles of the devices were observed using SEM and AFM system.