利用CO2反應氣體陰極電弧沉積Ti-O-C複合膜 之特性分析

Characterization of Ti-O-C Composite Films Prepared by Cathodic Arc Deposition Using CO2 as Reactive Gas

陳世雄(Shih-Hsiung Chen)

指導教授 ： 許正勳

大同大學/工程學院/材料工程學系所/碩士(2009年)

摘要

本研究主要是以陰極電弧沉積(Cathodic arc deposotion)技術，配合使用CO2反應氣體與Ti靶來沉積TiO/DLC複合膜於AISI 304不銹鋼基材上，其中鍍膜參數的變化是利用改變CO2流量以控制工作壓力而進行鍍膜，然後進一步分析各鍍膜特性(包括粗糙度、化學組成、附著性)以及進行AISI 304不銹鋼鍍膜前後之極化腐蝕(3.5wt%NaCl)、浸泡腐蝕(20vol%HCl)、磨耗及溼式沖蝕試驗，以探討披覆各膜層對AISI 304表面性質之影響。另外，在相同最佳工作壓力條件下，分別通入O2與C2H2以期披覆TiO及DLC單一膜層，作為性質對照組。
由實驗結果顯示在工作壓力5mtorr下披覆之TiO/DLC較佳附著性(HF1 vs HF2)複合膜層，相較於另外兩組參數(3、7mtorr)，具有較低的表面粗糙度(Ra值：0.17 vs 0.21~0.23μm)、與較高硬度(18 vs 15~16GPa)。此外AISI304經由披覆膜層(TiO/DLC、TiOX、DLC)後，耐蝕性、耐磨耗性、耐溼式沖蝕性均可獲得改善，其中又以TiO/DLC(5mtorr)複合膜的表現最佳。

關鍵字

陰極電弧沉積 ； AISI304 ； 不銹鋼 ； CO2 ； 耐磨耗 ； 耐腐蝕 ； 耐溼式沖蝕

並列摘要

In this study, the Ti-O-C composite coatings were synthesizes on AISI 304 stainless steel substrate by a cathodic arc deposition(CAD) system using CO2 reactive gas and Titanium (99%) target. Coating parameter were designed via the variation in the flow rate CO2 reactive gas to control the working pressure at three conditions of 3, 5, and 7 mtorr. Then the coating morphologies and properties such as roughness, chemical composition, structure, and adhesion were all analyzed. Moreover, polarization tests (in 3.5wt% NaCl), immersion tests (in 20 Vol%H2SO4), were tested, and wetting erosion tests were also performed for exploring the effects of working pressure on the coated AISI 304 stainless steel. For a comparison with these composite coatings, the monolithic coating of TiO and DLC were also respectively deposited with the same working pressure. The experiment results showed that for an optimized value of the working pressure, i.e. 5mtorr, the TiO/DLC composite coatings could be smoothly synthesized on AISI 304 substrate, and showed an improved properties, such as lower surface roughness (Ra：0.17 vs 0.21-0.23μm), higher adhesion strength (HF1 vs HF2), and hardness (18 vs 15-16 GPa) in comparison to the coatings deposition at other working pressure. Moreover, the optimum coatings achieved a remarkable improvement in the corrosion resistance, wear resistance, and erosion resistance of AISI 304 stainless steel.

並列關鍵字

Cathodic arc deposition ； AISI 304 stainless steel ； Carbon dioxide ； Corrosion resistance ； Wear resistance ； Wet-erosion resistance

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