多晶藍寶石基板之抗反射膜層設計研究

Investigating on the Antireflection Design of Poly crystal sapphire

羅立翔(Li-Xiang Luo)

指導教授 ： 廖洺漢

國立臺灣大學/工學院/應用力學研究所/碩士(2017年)

https://doi.org/10.6342/NTU201704141

摘要

過去藍寶石基板一直是昂貴的材料，製程時間長且良率低，基於以上因素使得藍寶石基板在市場上的競爭力不如強化玻璃，但現今發展出可以製造出價格較有優勢的多晶的藍寶石玻璃，製程時間大幅降低，良率大幅提升也可製成較大的尺寸，最重要的是，能夠降低50%甚至更多的成本，使得讓藍寶石基板成為智慧型手機面板，的議題再度被拋出，但多晶藍寶石有一大特性就是他的散射表現明顯，光穿透表現較單晶體藍寶石基板略低，在此研究，我們利用SiOx-Poly crystal sapphire-SiOx結構成功的將穿透率從83.3%提升92%，也將霧度從49.98%降低到40.16% 加上藍寶石基板本身超高硬度的特性，使藍寶石在手機蓋板發展上又更具優勢。

關鍵字

多晶藍寶石 ； 氧化矽 ； 蛾眼結構 ； 穿透率 ； 抗反射光學薄膜

並列摘要

Over the past years, sapphire substrate has been an expensive material. Its production is time-consuming and the yield rate is low. To date, there is a developed manufacturing process which is capable of producing poly crystal sapphire. It not only dramatically reduces the time of its production, but also increases its yield rate. Moreover, it is also available for bigger size. Most important of all, the production cost could be reduced more than 50% and its applicability on the touch panels of mobile phones becomes an issue worthy of further investigation due to this new manufacturing process. In this study, we make use of the structure of SiOx/Poly crystal sapphire(CMP)/SiOx to successfully improve the transmittance of poly crystal sapphire CMP from 83.3% to 92% and reduce the haze from 49.98% to 40.16%. In addition, the high level of hardness of sapphire substrate makes it a great advantage in its development of the screens of smart mobile phones

並列關鍵字

Poly crystal sapphire ； SiOx ； Moth eye structure ； Transmittance ； Antireflection

參考文獻

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