永磁式磁浮軸承於拖曳式真空幫浦之應用

The Permanent Magnetic Bearings Appliance for Drag Vacuum Pump

楊長霖(Chang-Lin Yang)

指導教授 ： 范憶華

中原大學/工學院/機械工程研究所/碩士(2011年)

https://doi.org/10.6840/cycu201100975

摘要

摘 要
本文針對真空分子幫浦轉子系统中軸承部分進行改良設計，採用高效能釹鐵 (NdFeB)製之永久磁鐵依相斥性排列做為磁浮媒介時，製作真空分子幫浦用之全磁浮式被動磁軸承，利用磁鐵外型變化讓磁極產生軸向力和徑向力來達到轉子系統平衡的目的。
首先先針對真空分子幫浦介紹，分別依真空分子幫浦的分類、做動原理、使用環境、軸承系統做區分。改良原本全磁浮軸承的控制問題及陶珠軸承的壽命問題，提出一項簡易安裝及控制的軸承系統。
其中堆疊磁鐵環之磁路走向與磁力大小，定、轉子磁鐵環之間的相對位移、永久磁鐵極性的排列方式和堆疊層數等因素對軸承程載強度與穩定性的影響亦在討論範圍
本研究使用先磁場分析軟體進行堆疊磁鐵環的磁力線分布情形與磁力大小等分析，由分析結果進行成品測試來確認本位之可行性。

關鍵字

被動式磁浮軸承

並列摘要

Abstract
This paper focuses on vacuum pump rotor system design to improve bearing parts, using high performance NdFeB arranged as a system of permanent magnets repel when magnetic media, making molecular vacuum pumps with magnetic float type passive magnetic bearings, magnet shape change pole axial force and radial force to achieve the goal of rotor balance. First vacuum pumps described, respectively, in accordance with the classification of vacuum pumps, principles, use of the environment, bearing system is case sensitive. Modified original magnetic bearings control problems and Tao Zhu bearing life problems, propose a simple installation and control of bearing system. Which stack magnet ring of magnetic road to and magnetic size, set, and rotor magnet ring Zhijian of relative displacement, and permanent magnet polarity of arranged way and stack layer number, factors on bearing Cheng contains strength and stability of effect also in discussion range this research using first magnetic field analysis software for stack magnet ring of magnetic lines distribution situations and magnetic size, analysis, by analysis results for finished test to confirmed standard of feasibility.

並列關鍵字

magnetic bearings

參考文獻

2. R.Moser, J.Sandtner and H.Bleuler,”Optimization of Repulsive Passive Magnetic Bearings,” IEEE Trans.Magn., vol. 42, NO.8, pp. 2038-2042, Aug 2006.

參考文獻

1. 黃忠良 ，磁懸浮與磁 軸承，第 1-13 頁，復漢出版社，台南，台 灣，2001。

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