仿高砂熊蟬的翅膀奈米結構提升單晶矽的機械強度

Strengthening of Single Crystal Silicon by Mimicking the Surface Nanostructures on Cicada's Wing

陳其男(Chi-Nan Chen)

指導教授 ： 葉哲良

國立清華大學/電機資訊學院/電子工程研究所/博士(2009年)

https://doi.org/10.6843/NTHU.2009.00055

摘要

A strengthening method, nanohole strengthening, is proposed by mimicking the surface nanostructures on Cryptotympana takasagona Kato cicada's wing. Nanohole plates maintain the Young's modulus and the characteristics of brittle material because only surface morphology is modified. The nanoholes patterned on the region of tensile bending stress dominate the failure behavior and determine the bending stress at rupture. The bending stress at rupture of nanohole plates is 6 times larger than that of polished plates. The dynamic response of nanohole plates with the dimensions of 40 mm × 10 mm × 0.1 mm sustains the flapping frequency of 40 Hz and the displacement of 2 cm without failure behavior, performing the remarkable deflection in vibration environment.

關鍵字

機械強度

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