多頭原子力顯微鏡探針應用於奈米級動態檢測

Multi tips atomic force microscopy for dynamic nanomovement detection

邱彥凱(Chiu, Yen Kai)

指導教授 ： 曾繁根 ； 王本城

國立清華大學/原子科學院/工程與系統科學系/碩士(2015年)

https://doi.org/10.6843/NTHU.2015.00173

摘要

本篇論文中，描述如何改良一般商業用原子力顯微鏡(Atomic Force Microscopy, AFM)探針，形成特殊的多頭結構，並用於高速與高解析之奈米級動態檢測，其針尖曲率半徑可達2.5奈米，且在偵測壓電致動器(Piezoelectric Actuator, PZT)上顆粒位移時，其時間解析可達10毫秒，多頭探針亦可偵測生物分子的奈米級位移。
為了要更進一步提高在偵測分子時的時間解析能力，本研究提出一種更簡單的方式來直接偵測奈米級動態，主要是將AFM探針改成多頭結構，可有效的把時間解析提升到毫秒等級(與傳統方式相比改善了近10倍)，且空間解析與AFM機台仍維持一致，而這種多頭探針是被設計用來偵測F1型三磷酸腺苷合成酶(F1 Adenosine Triphosphate Synthase, F1-ATPase)之動態。
實驗結果顯示，多頭探針已成功的透過奈米金球(Gold Nanaparticles, GNPs)沉積與反應式離子蝕刻(Reactive Ion Etching, RIE)製造出，並用來偵測奈米級位移，接著我們展現了單頭與多頭探針偵測PZT和F1-ATPase之結果。

關鍵字

原子力顯微鏡 ； 多頭奈米結構 ； 高速與高解析之奈米級動態檢測

並列摘要

In this paper, we nano-engineered commercial atomic force microscope (AFM) probes with multi nano tip structures for high speed/resolution dynamic nanodetection. The tip radius could be shrunk down to 2.5 nm, and the time resolution could be approaching 10 ms for measuring particle movement on piezoelectric actuator (PZT). The multi tip AFM can be applicable for detecting the dynamic movement of bio-molecules.
To further enhance the time resolution for resolving molecule movement, this research proposes a simpler method to detect dynamic nanomovement by modifying the AFM tip from single tip into multi tips, which can greatly enhance the time resolution into ms level (10 times improvement), while spatial resolution is kept at standard value and the AFM control system is kept unchanged. The multi head tips are designed to measure nano displacement of F1 adenosine triphosphate synthase (F1-ATPase).
From the experimental results, multi tips probe has successfully manufactured by deposition of gold nanaparticles (GNPs) and reactive ion etching (RIE) for dynamic nanodetection. Then we demonstrate that single tip and multi tips probe can detecting nanomovement of PZT and F1-ATPase.

並列關鍵字

Atomic fore microscope (AFM) ； Multi nano tip structures ； High speed/resolution dynamic nanodetection

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