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Search Symbol (Half-width) Description of Search Symbols
Space "AND" indicates the intertwining of key terms used in a search
Double Quotation Marks ("") ( " " ) Double quotation marks indicate the beginning and end of a phrase, and the search will only include terms that appear in the same order of those within the quotations. Example: "image process" : " image process "
? Indicates a variable letter. Entering two ? will indicate two variable letters, and so on. Example: "Appl?", search results will yield apple, apply… e , appl y … ( (often used to English word searches) )
* Indicates an unlimited number of variable letters to follow, from 1~n. Example: Enter "appl*", search results will yield apple, apples, apply, applied, application…(often used in English word searches) e , appl es , appl y , appl ied , appl ication … ( (often used to English word searches) )

Boolean logic combinations of key words is a skill used to expand or refine search parameters.
(1) AND (1) AND: Refines search parameters
(2) OR (2) OR: Expands search parameters (3) NOT: Excludes irrelevant parameters


DOI stands for Digital Object Identifier ( D igital O bject I dentifier ) ,
and is the unique identifier for objects on the internet. It can be used to create persistent link and to cite articles.

Using DOI as a persistent link

To create a persistent link, add「」 「 」 before a DOI.
For instance, if the DOI of an article is 10.5297/ser.1201.002 , you can link persistently to the article by entering the following link in your browser: 10.5297/ser.1201.002
The DOI link will always direct you to the most updated article page no matter how the publisher changes the document's position, avoiding errors when engaging in important research.

Cite a document with DOI

When citing references, you should also cite the DOI if the article has one. If your citation guideline does not include DOIs, you may cite the DOI link.

DOIs allow accurate citations, improve academic contents connections, and allow users to gain better experience across different platforms. Currently, there are more than 70 million DOIs registered for academic contents. If you want to understand more about DOI, please visit airiti DOI ) 。

Abstract 〈TOP〉
Parallel Abstract 〈TOP〉
Reference ( 25 ) 〈TOP〉
  1. [1] H. S. a. R. Swann, "Chemical vapour deposition promoted by rf discharge," Solid-State Electronics, vol. 8, pp. 653-654, 1965.
  2. [2] R. Chittick, "The preparation and properties of amorphous silicon," Journal of the Electrochemical Society, vol. 116, p. 77, 1969.
  3. [3] K.-Y. Chan, "High-mobility microcrystalline silicon thin-film transistors prepared near the transition to amorphous growth " Journal of Applied Physics, vol. 104, pp. 054506 - 054506-6, 2008.
  4. [4] A. Matsuda, "Formation kinetics and control of microcrystallite in μc-Si:H from glow discharge plasma," Journal of Non-Crystalline Solids, vol. 59-60, pp. 767–774, 1983.
  5. [5] C. C. Tsai, Amorphous Silicon and Related Materials. Singapore: World Scientific, 1988.
Times Cited (3) 〈TOP〉
  1. 吳思諭(2014)。調變閘極介電層及類磊晶矽薄膜通道厚度製作快速寫入/抹除之非揮發性記憶體。清華大學電子工程研究所學位論文。2014。1-112。
  2. 許仲豪(2014)。臨界電壓可調式之可三維堆疊嵌入式源/汲極超薄通道電晶體。清華大學光電工程研究所學位論文。2014。1-112。
  3. 陳譽修(2016)。低熱預算遠紅外光雷射技術應用於可三維堆疊之多晶矽電晶體。清華大學電子工程研究所學位論文。2016。1-87。
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