潔淨室之節能策略評估

Assessment of Energy-saving Strategies for Clean Rooms

鄭鼎耀(Din-Yao Jheng)

指導教授 ： 施陽正

國立臺北科技大學/機電學院/能源與冷凍空調工程系碩士班/碩士(2010年)

摘要

由於高科技廠房對於室內工作環境潔淨度要求甚高，需保持在恆溫恆濕的狀態，故空調及廠務系統的耗電量往往占去全廠耗能的60%，而潔淨式

的循環氣流又佔了空調及廠務系統的25%，近年來電價逐年高漲，對於能源管理的概念也越來越受到重視。有鑑於此，採用潔淨室最佳化的設計

以達到”使用最少的能源，滿足潔淨室內對於溫濕度以及潔淨度的要求”為終極的目標，作為本研究主要之方向。
在案例一中，本研究以某TFT面板廠為標的物，改變空調系統之運轉參數對於潔淨室節能之可行性進行討論，其中包括外氣空調箱使用不同加濕

方式、不同出風溫度、不同FFU覆蓋率以及不同FFU之出風風速耗能之比較，案例二中，以一潔淨室為研究標的物，探討牆回風與風機乾盤管組

回風兩種不同形式空氣循環系統全年耗能之比較。

關鍵字

潔淨室 ； 能源換算係數 ； 外氣空調箱

並列摘要

Cleanrooms in high-tech fabs are commonly applied to meet the stringent requirement of high cleanliness processing

environment. Heating, ventilating, and air-conditioning (HVAC) system is therefore remarkably utilized to control the indoor

temperature and relative humidity of cleanroom within narrow ranges. The HVAC system accounts for 60% of the annual total

energy usage in the high-tech fabs, and the recirculation air system in cleanroom may make up to 25% of the total energy

usage in HVAC system. The knowledge of efficient management on energy usage is essential in parallel with the growing focus

on energy conservation and building electricity utility rating systems in recent years. Thus, proper design of HVAC system

for high-tech cleanrooms is essential. This study aimed to investigate the optimum HVAC system design to meet the stringent

requirements of high-tech cleanroom with minimum energy consumption based on two case studies.
For Case 1, numerical assessments were conducted to study the feasibility of variation on operating parameters of ventilation

system in high-tech cleanrooms for potential energy conservation. The potential energy use of ventilation system were

evaluated based on several criteria, such as humidification methods applied in outdoor make-up air unit (MAU), temperature of

supply air, area coverage of fan filter units (FFUs), and supply air velocity. For Case 2, comparison of the annual energy

consumption of two different air recirculation system for a cleanroom with wall-return air recirculation system and fan dry

coil unit air recirculation system was included.

並列關鍵字

Cleanroom ； Energy Convection Factor ； Make-up Air Unit

參考文獻

[5] 曹志明，「高科技廠房空調系統節能策略之研究」，博士論文，國立台北科技大學機電科技研究所，民國九十八年。

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[2] P. Naughton, “Measurement of Conservation of Energy by Semiconductor Manufacturing Equipment and setting of targets

[8] S. C. Hu, J. M. Tsao, “A comparative study on energy consumption for HVAC systems of high-tech FABs”, Applied

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