以化學氣相沉積法成長選區跨接碳管之研究

葉澤宏

指導教授 ： 戴念華

國立清華大學/工學院/材料科學工程學系/碩士(2006年)

摘要

在實驗中改變鋁鐵鉬催化劑鍍膜順序及分層結構，發現單壁奈米碳管之成長會因不同鍍膜程序而有所差異，由此本研究探討鋁鐵鉬催化劑系統在成長碳管過程中所呈現的狀態對其成長的影響並探討其機制。此外，也將鋁鐵鉬催化劑系統鍍於不同的基板上(氧化鋁、氧化鎂及氮化鋁)，比較不同基板上所成長出來的碳管之差異性，可以更了解不同的基板能否適用於鋁鐵鉬催化劑系統。
研究中包括了用鋁鐵鉬催化劑來成長跨接碳管，並使用覆蓋阻絕層來作選區定位以成長跨接碳管，控制了碳管生長位置並使碳管具側向成長，使試片上存在著跨接碳管。藉由本實驗之設計，吾人發現阻絕層與催化劑應有的適當比例調配，方能成長出跨接碳管。

關鍵字

單壁奈米碳管 ； 鋁鐵鉬 ； 跨接

並列摘要

Abstract

In this work, the influences of sequence of the deposited thin films (Al, Fe and Mo), which were coated onto SiO2/Si substrates for forming multi-layer catalyst system, on the growth of single-walled carbon nanotubes (SWNTs) were studied. Experimental results showed that different morphologies and number of SWNTs were obtained when different catalyst systems were adopted. The feasible mechanism of the Al-Fe-Mo catalyst system for growing SWNTs wsa discussed. Besides, Al-Fe-Mo catalyst system was also deposited on different substrates (sapphire, MgO and AlN), and difference of the synthesized CNTs on these substrates was discussed. The result shows that Al-Fe-Mo catalyst system was suitable for sapphire and MgO substrates for grown SWNTs.
Growth of the bridging SWNTs using Al-Fe-Mo catalyst system is also studied. In this study, the bridging SWNTs were synthesized successfully by covering insulated layer (MgO) on catalyst. By controlling the growth of SWNTs grown in the lateral direction, bridging SWNTs connecting catalyst pads were made. This work also found that a proper ratio of insulated layer to catalyst layer is required for obtaining bridging SWNTs.

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