材料奈米壓痕及奈米磨潤性質量測之研究

Study on material properties measurement for nano-indentation and nano-tribology

蘇佳宏(Chia-Hung Su)

指導教授 ： 于劍平

崑山科技大學/工程學院/機械工程研究所/碩士(2004年)

https://doi.org/10.6828/KSU.2004.00004

摘要

因微奈米技術的快速發展，使微奈米結構及薄膜材料日益重要且運用領域也愈來愈廣，然而一般於傳統巨觀尺度下所量測出之材料性質，與奈米微觀下之性質差異甚大，無法直接運用於微奈米的領域，因此必須重新設計實驗量測方式，以求得微奈米級的材料性質。
本研究中針對材料性質之奈米壓痕與奈米磨耗進行實驗，其中奈米壓痕量測則先對材料表面粗糙度影響作分析，之後再以鍍鉻薄膜材料加以探討其基材效應。而奈米磨耗量測則先以田口分析方式找出其影響磨耗製程之重要參數，之後再以實驗之塊材與鍍鉻薄膜材料相互比對其磨潤型態。
奈米壓痕材料表面粗糙度影響分析實驗之結果顯示，表面粗糙度不同會造成奈米壓痕之負載與卸載曲線變化不同，造成量測硬度值亦相對不同。奈米壓痕之薄膜基材效應分析實驗結果顯示，所得實驗分析曲線可分成三個階段，第一階段為壓痕作用，第二階段為薄膜塑性變形，第三階段為薄膜與基材綜合效應。
奈米磨潤製程參數田口分析實驗之結果顯示，影響奈米磨耗量主要參數為工件材料，其次是旋轉中心距離。影響奈米摩擦係數主要參數為工件材料，其次是旋轉中心距離。奈米磨潤之薄膜基材效應分析，實驗結果顯示，鋁會產生捲曲之磨削碎屑，矽晶圓會產生磨耗碎粒，薄膜材料若負荷過大時，則會在薄膜表面產生微裂痕。

關鍵字

奈米壓痕 ； 田口方法 ； 摩擦力 ； 摩擦係數 ； 奈米磨潤

並列摘要

The micro/nano structure and thin film material are more and more important and the application areas are more and more extensive because the development of micro/nano technology is very fast. However, the material properties have great differences cinder micro and nano-scale measurement. We can directly use micro-scale material properties in nano-scale measurement. Therefore, we must re-design the method of experimental measurement, and then get the nano-scale material properties.
In this investigation, the material of nano-indentation and nano-tribology will be proceesed experiment. The section of nano-indentation has two experiments. One experiment is to find the effect of roughness and nano-indentation hardness. Another experiment is to find the effect of the substrate in Cr film materials. The section of nano-tribology also has two experiments. One experiment is employed Taguchi Methods to find the influencing factors of nano-tribology bulk. Another experiment is compared of tribology modulus for bulk materials and Cr film material.
The results of nano-indentation are show that surface roughness effects the nano-indentation of loading and unloading curves. The results of substrate effect are found that the experiment curves have three stages. The first stage is indentation of Cr film. The second stage the deformation of thin film. The third stage is the compound effect of thin film and substrate.
The experiments of Taguchi method for nano-tribology process parameters are show that the main influencing factors are material and distance of revolution center for nano-scale wear. The main influencing factors for coefficient of friction are material and distance of revolution center. The results of thin film substrate effect for nano-tribology are shown that the aluminum will produce the debris shaped like a roll, and the silicon wafer will produce the dispersed debris. If the load is over for the thin film material, the micro-crack will be produced on the surface of thin film.

並列關鍵字

nano-indentation ； nano-tribology ； coefficient of friction ； friction ； Taguchi method

參考文獻

[1]T. A. Laursen and J. C. Simo, “A study of the mechanics of microindentation using finite elements”, J. Mater. Res., Vol. 7, No.3, Mar 1992, pp.618-626.

[2]W. C. Oliver, G. M. Pharr and F.R. Brotzen, “On the generality of the relationship among contact stiffness, contact area, and elastic modulus during indentation”, J. Mater. Res., Vol. 7, No.3, Mar 1992, pp.613-617.

[3]W. C. Oliver and G. M. Pharr, “An improved technique for determining and elastic modulus using load and displace sensing indentation experiments”, J. Mater. Res., Vol. 7, No.6, June 1992, pp.1564-1583.

[4]J. S. Field and M. V. Swain, “A simple predictive mode for spherecal indentation”, J. Mater. , Vol. 8, No.2, Feb 1993, pp. 297-306.

[6]A. Revikiran, B. N. Pramila Bai, “Observations on the role of the steel disc counterface during the sliding of various structural ceramics”, Wear, 181-183, 1995, pp.544-550.