高分子波導之製程研究與分析

Investigations of the polymer waveguide processing

張政偉(Cheng-Wei Chang)

國立虎尾科技大學/電機資訊學院/光電與材料科技研究所/碩士(2004年)

摘要

在本篇論文中，主要開發研究一新穎材料︰環烯烴聚合物(Cyclo olefin
copolymer; COC) 來製作光波導 (waveguides of light wave circuit; PLC) 元件。
經過材料性質的分析後，發現 COC 之特性較之傳統材料 PMMA 和 PC 更適
合應用於光學波導元件上。經過 COC 微熱壓成形實驗後，找到最佳壓印
及脫膜參數，可作為日後發展光通訊及感應器之重要依據。

並列摘要

In this thesis, we will used a novel material: Cyclo olefin copolymer (COC)
to fabricate a planar waveguide. After material characterization, we discovered
that the properties of COC in making optical waveguide devices are much better
than that of PC and PMMA. Using the ICP-RIE (Inductively Coupled Plasma
Reactive Ion Etching) to fabricate the silicon mold. After hot emboss processing,
the optimal parameters for sample preparing is obtained. Those experimental
data is very important and helpful for developing the optical communication and
sensor applications in the future.

參考文獻

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annealing in FHD Ge-doped SiO2 film for applications in optical waveguides,

SiO2-SiON planar waveguides deposited by PECVD method, Surface and