奈米級旋轉軸光學量測系統

An Electric-Optical Measurement System for Rotational Error with the Nano-Meter Resolution

林文祥(Wen-Hsiang Lin)

指導教授 ： 劉建宏

國立虎尾科技大學/電機資訊學院/光電與材料科技研究所/碩士(2008年)

摘要

本論文提出一種新型之光學量測系統，用於旋轉軸誤差檢測，元件包括平凹面鏡、DVD雷射讀取頭，四象限感測器(Quadrant Detector)，主要是以DVD雷射讀取頭做為量測光源，以平凹面鏡固定在旋轉軸下方做為反射聚焦元件，並利用四象限感測器作為感測元件。此量測方式之優點為，系統不需要使用標準試件，架設及操作容易，可避免標準試件之精度影響系統量測精度，整體之檢測裝置成本低廉，系統可微小化，以及精密度可達奈米級。本論文開發的光學量測系統位移解析度70 nm，在25 μm位移距離最大線性誤差約±1 μm，標準差在0.03以內。本量測系統實際應用於真圓度機旋轉軸之轉速在4 rpm、6 rpm、10 rpm之旋轉誤差分別為1.064、1.066、1.099。標準差分別為0.016 μm、0.012 μm、0.007 μm。

關鍵字

旋轉軸誤差、平凹面鏡、DVD雷射讀取頭、四象限感測器

並列摘要

This study developed a novel electric-optical measuring system to measure the rotation-spindle errors with the nanometer resolution. It is composed of a plano-concave mirror, a DVD pickup, and a quadrant detector. The plano-concave mirror was fixed on the rotational spindle and the laser beam from the DVD pickup was projected on the plano-concave mirror and was reflected back to the DVD pickup to focus on a quadrant detector. When the spindle rotates, the plano-concave mirror was also rotated. The run out error was measured via the changed position of the focus point on the quadrant detector. The proposed system was set up on a roundness measuring machine. The result of experimental measurement showed that the displacement resolution is about 70 nm and the linearity error is about ±1 μm within the range of 25μm. The standard deviation is less than 0.03 μm. The speed of rotational spindle was tested at 4 rpm、6 rpm、10 rpm. The rotational errors were 1.064μm, 1.066 μm and 1.099μm. The standard deviation of measured results at 4 rpm、6 rpm、10 rpm were 0.016 μm, 0.012 μm and 0.007 μm respectively.

並列關鍵字

run out, spindle, rotational motion error, plano-concave mirror, DVD pickup head, quadrant detector

參考文獻

[1] ANSI/ASME B89.3.4M-1985, Axes of rotation, method for specifying and testing

[2] Marsh, E., Grejda, R. “Experiences with the master axis method for measuring spindle error motions” Precision Engineering 24 50–57, 2000.

[3] Grejda.g, E. Marsh, R. Vallance, “Techniques for calibrating spindles with nanometer error motion”，Precision Engineering 29 113–123 ,2005

[4] 覺文郁、白永耀、詹全安、陳俊仁，“一種簡單旋轉軸誤差量測系統之開發”，機械月刊，民94.03，頁94-105

[5] 陳俊仁，“使用雷射四像儀檢測精密機具性能”，國立成功大學機械工程學系碩士論文，2003