藉Preisach模型為基礎之遲滯線性化提升同步壓電平臺伺服性能

Synchronized piezo-actuated stage control using Preisach model based on phenomenon linearization

徐廣昊(Guanghao Xu)

指導教授 ： 顏家鈺

國立臺灣大學/工學院/機械工程學研究所/碩士(2017年)

https://doi.org/10.6342/NTU201702981

摘要

壓電制動器具備高位移解析度以及良好之操作頻寬，因此被廣泛應用於微控制系統之中。然而，以壓電材料製成之驅動器在輸入電壓以及位移間含有遲滯所造成之非線性現象，造成控制上的困難，使其定位控制之精確度受到限制。此外，定位之時，雙驅動器位置之不相等亦會阻踞控制成果。
本論文針對遲滯效應所造成的非線性現象做補償，使遲滯對系統所造成的影響線性化，進而提升控制之精確度。依據文獻中提出的電荷控制架構，已知流經壓電制動器之電荷量與其伸長量呈線性關係，因此可藉串接於壓電制動器之電容量測電荷量進而得知遲滯所造成的電壓消耗，以此建立補償器以利補償其非線性效應，並針對已經線性化的系統也設計了位置追蹤補償器。此外，本論文針對硬體架構之特點提出了一種交互耦合控制器以在不同操作頻率之下對雙壓電驅動器所產生的非同步現象進行修正，以簡易且快速之方式大幅提升不同頻率下雙驅動器的同步驅動控制效果。
壓電制動器之模型與分析、參數識別、Preisach模型之建構、交互耦合控制器的設計方法將在本論文仲介紹與討論。最後佐以不同控制頻率下之驗證結果。

關鍵字

壓電制動器 ； 遲滯補償 ； Preisach ； 同步

並列摘要

With high resolution and large bandwidth, piezo-actuator is widely used in precision position control system. However, there is nonlinear effect caused by hysteresis phenomenon between input voltage and displacement of the piezo-actuator which increases the difficulty for control, thus degrades the precision of control result. Besides, dual actuators position difference limits the performance as well.
In this thesis, for the sake of enhancing the control performance, the nonlinearity caused by hysteresis phenomenon is compensated, so the system now is a linear mechanic system. Referring to the charge control structure proposed by L.S. Chen et al., it is shown that the relationship between charge flowing through the piezo-actuator and its elongation is linear. Therefore, by measuring the charge flowing through the piezo-actuator, the voltage consumption caused by the hysteresis can be obtained and the hysteresis compensator can be built to compensate the nonlinear effect and then, due to the system can be regarded as a linear mechanic system after being compensated, a tracking controller is designed for positioning. Besides, a cross-coupled controller is designed referring to the hardware structure to fix asynchrony phenomenon under different frequencies on produced by dual-actuators, improves the control results significantly in a simple and rapid pattern.
Piezo-actuator’s modeling and analyses, system parameters identification, Preisach model building, cross-coupled controller design method are introduced and discussed in this thesis. For validity, a series of experiments under several frequencies are implemented in this thesis.

並列關鍵字

piezo-actuator ； hysteresis compensator ； Preisach ； synchronizatio

參考文獻

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