台灣矽晶圓再生產業之經營與發展研究

Development and Management of Silicon Wafer Reclaim Industry in Taiwan

洪福益(HASH(0x1dc397e0))

指導教授 ： 林博文

國立清華大學/科技管理學院/高階主管經營管理碩士在職專班/碩士(2008年)

https://doi.org/10.6843/NTHU.2008.00741

摘要

再生晶圓的使用時機；IC晶圓製造廠中控片(Control wafer)及擋片(Dummy wafer)的使用時機為監控機台製程參數、當機維護、預防保養、機台熱機與條件化以及製程改善實驗使用等。主要目的為即時偵測機台製程參數和維持加工環境，持續掌控一連串精密製程的進行。控擋片的使用為掌握半導體設備製程能力，維持良率的必須工具，控檔片斷料將使生產步驟被迫中斷，進而引發產出減少與生產規劃波動的情形。
控檔片的新片供應來自矽晶圓供應商，而再生晶圓(reclaim wafer)為使用過的控片及檔片，或是報廢下腳的產品晶圓(pattern wafer)，經由研磨及拋光後回復到與原始晶圓相同等級的潔淨度與平坦度，再回到控擋片使用流程中。過程中除了晶圓厚度因研磨拋光而變薄外與原始晶圓並無太大的品質差異。使用再生晶圓作為控檔片可以減少晶圓廠對晶圓新片的消耗，有助於降低生產成本。
1997年以前台灣的矽晶圓再生，皆以委託國外再生晶圓廠代工為主，由於考慮物料的周轉效率及運費的成本，因此日本的代工廠便成為首選。當時台灣的半導體IC製造廠其主要的晶圓尺寸為八吋。1997年3月昇陽半導體公司首先在台設立生產線，以就近服務國內之半導體IC製造廠。在昇陽設立產線後，中國砂輪公司轉投資的金敏精研公司(中國砂輪公司晶圓事業部的前身。)，在工研院的技術奧援下，也積極投入再生晶圓業。大同的尚志半導體公司也加入。時至今日2008年 ，半導體的發展迅速，晶圓尺寸已由原來的八吋為主，轉變為12吋為主。而IC製程的線寬也由0.35um 演進到現在的70nm ；甚至是45nm。隨IC半導體產業的蓬勃發展，矽晶圓再生廠的設立也在2007達到高峰，遍佈在全球各地已接近二十家。這二十家爭食同一市場，只要半導體產業稍有不景氣，產能利用率下降，則供過於求的窘境，就立即出現。在這樣的市場考驗下，削價競爭在所難免，因此賺錢者少；賠錢者多。本論文將透過產業資訊的收集；及實際營運的經驗；進行分析與策略發展比較，以找出可能勝出市場的經營策略與模式。

關鍵字

再生晶圓 ； 矽晶圓

並列摘要

In IC foundries, the test wafers, also known as control wafer or dummy wafer, are used for monitoring production process, production equipment, manufacturing environment or optimizing parameters setting etc. Since the semiconductor production is so sophisticated that the stability and consistency of production process are crucial. Through using of test wafers, engineers can acquire real time information about process, equipment or environment, helping them to maintain a high and stable yield rate. Therefore, they can lower the yield loss and smooth the production plan. Consequently, the test wafer is one of the essential materials in IC foundries.

Virgin test wafers are supplied by silicon wafer makers while reclaim wafers are provided by reclaim wafer suppliers. After a series of processes, which are mainly grinding, polishing and cleaning process, the used test wafers or scrap pattern wafers can be reclaimed to original condition and ready to be used again. The wafer is now called reclaim wafer after a reclaim process. The qualities of a reclaim wafer are normally the same as a virgin test wafer in terms of cleanness, flatness, except for thickness. Moreover, the price of reclaim wafer is relatively cheap comparing to virgin test wafer. Using reclaim wafers as test wafers or control wafers can reduce consumption of virgin test wafers, and reduce production cost consequently.

Before 1997, all IC foundries in Taiwan sent their wafers to reclaim wafer suppliers overseas, mainly to Japanese companies considering higher return rates and lower shipping costs. The majority of wafers is 8 inch at that time. In 1997 Mar. PSI established the first reclaim wafer production line in Taiwan, providing domestic reclaim wafer service. Afterward, KPG, invested by Kinik company, started entering this business area actively through the technical support from ITIS. SCSC also built a reclaim wafer factory in 1998. Nowadays, semiconductor industry has grown up rapidly. The dominant wafer size has become 12 inch, the line width of circuit has evolved into 70nm, even 45nm from 35nm. Accompanying the prosperity of semiconductor industry, the number of reclaim wafer suppliers has reached the highest peak, which were nearly 20 companies throughout the world. However, once the economy is turning down, or the utilization of capacity drops, supply of reclaim wafer will exceeds demand easily. Under these circumstances, reclaim wafer suppliers often struggle to make a profit. By analyzing market information, different strategies and real experiences in reclaim wafer industry, this essay is expected to conclude a winning business strategy and business model.

並列關鍵字

HASH(0x1dc43b00) ； HASH(0x1dc43ba0)

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