利用田口實驗方法改善彩色濾光片品質

Improving Color Filter Quality by Taguchi Method

何桂泰(Kei-Tai Ho)

指導教授 ： 陳建良

中原大學/工學院/工業工程研究所/碩士(2006年)

https://doi.org/10.6840/cycu200600644

摘要

摘要
彩色濾光片RBG製程影響了TFT-LCD色彩性能，而導電薄膜，銦錫氧化物 (Indium Tin Oxide; ITO)製程則影響了顯示器影像明亮之效果。在彩色濾光片中ITO薄膜為一關鍵製程，其主要目的是與 LCD Patten (array substrates)電極構成正負極以驅動液晶分子旋轉，因為低電阻與高透光性的要求，因此在製程上亦要求需具備一定的穩定性。

本篇以位於北台灣之某家彩色濾光片廠為其探討個案，利用田口方法來改善彩色濾光片品質。在ITO薄膜的沉積過程中有數個可控制的參數，找出其中影響品質特性之顯著因子，應用L18的直交表經過多次的要因配置下產生實驗數據，再藉由變異數分析與S/N之方法找出ITO沉積之最佳製程參數，此最佳製程參數可改善並引導獲得符合低電阻、高均一性的薄膜品質。因此本個案之探討結論可做為次世代彩色濾光片廠提昇品質的參考依據

關鍵字

面電阻值 ； 薄膜液晶顯示器 ； 磁控濺鍍法 ； 彩色濾光片 ； 液晶顯示器 ； ITO薄膜 ； 均一性 ； 田口方法

並列摘要

ABSTRACT
The Red-Blue-Green (RBG) process of color filter influences the color performance of TFT-LCD. The film deposition process of conductive Indium Tin Oxide (ITO), a key process of color filter fabrication, affects the display brightness. This process forms the positive-negative diodes with the pattern electrodes on array substrates to twist the liquid crystal molecules between two electrodes. Because of the low resistance and high transmittance requirements, a stable fabrication process is required.
This research used Taguchi method to improve the color filter quality. The experiments were conducted at a color filter factory located in north Taiwan. Several control parameters of ITO’s film deposition process were used in the experiments, and significant factors affecting thin film properties were identified. The experiment data were analyzed based on Orthogonal Array L18 with multiple variable calculations. ANOVA and S/N were also used to find the optimal process parameters of ITO deposition leading to improved film quality properties such as low resistance and high uniformity. The result of this study could be a good reference for setting up the next generation factory.

並列關鍵字

Uniformity ； Thin Film Transistor LCD (TFT-LCD) ； Liquid Crystal Display (LCD) ； Color Filter ； Sheet Resistance ； ITO (Indium Tin Oxide) Film ； Magnetron Sputtering Deposition

參考文獻

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