金屬薄膜之光學與機械性質研究

Optical and Mechanical Properties of a Metallic Layer

王奕翔(Yi-Hsiang Wang) ； 何旭川(Shiuh-Chuan Her) ； 蕭健男(Chien-Nan Hsiao) ； 陳宏彬(Hung-Pin Chen)

《科學與工程技術期刊》 4卷1期 (2008/03) Pp. 81-88

https://doi.org/10.7117/JSET.200803.0081

摘要

光學系統常以金屬薄膜爲反射鏡面，藉以改變光的傳播路徑或接收光訊號，如反射式望遠鏡、高效率發光二極體等。鋁(Al)和銀(Ag)爲最常使用的金屬，並以玻璃或矽爲支撐金屬薄膜的基板，由於金屬膜屬軟膜，常因使用中的擦拭而磨耗，需在金屬膜表面加鍍保護層。本文以電子槍蒸鍍技術，蒸鍍鋁和銀膜於B270之玻璃基板，並以二氧化矽(SiO2)爲保護層，同時爲增加銀膜與B270基板之附著力，於B270基板表面蒸鍍鉻(Cr)。探討不同膜厚下的光學反射率及保護層對反射率之影響，求得最佳之金屬薄膜與保護層厚度，並將實驗量測值與理論計算值相比，獲得相當吻合的結果。再應用奈米壓痕機量測薄膜在不同厚度之硬度與楊氏係數，百格刀檢測薄膜與基板之附著力，藉以瞭解金屬薄膜之機械性質。

關鍵字

電子槍蒸鍍 ； 反射率 ； 奈米壓痕機 ； 機械性質

並列摘要

In an optical system using a metallic layer as a reflecting mirror, it is common to change the optical path. Aluminum (Al) and Silver (Ag) have been widely used for depositing on a silica-based substrate to form a thin metallic film. In this research, metallic films of Al and Ag are deposited on a B270 substrate by using the electronic-beam vapor deposition technique, being coated with SiO2 on the top surface to protect the metallic film. The effects of the thickness on the reflectance are determined through a parametric study and validated by an experimental measurement. The influence of a protective layer of SiO2 on the reflectivity is also investigated. The mechanical properties and adhesive strength of the metallic film are determined by nanoindentation and an attachment test, respectively.

並列關鍵字

electronic-beam vapor deposition reflectance nanoindentation mechanical property