離子感測場效電晶體巨集行為模型開發與感測陣列訊號處理電路設計

The Development of ISFET Behavior Macromodel and the Signal Process Circuit Design of Sensor Array

劉康義(Kang-Yi Liu)

指導教授 ： 鍾文耀

中原大學/工學院/電子工程研究所/碩士(2004年)

https://doi.org/10.6840/cycu200400688

摘要

摘 要
鑑於提昇生醫感測訊號穩定性與可靠度之需求，多功能與大集合之離子感測陣列應用成為近年來研究的課題。本篇論文之主要目的為離子感測場效電晶體巨集行為模型開發與適用於感測陣列應用之訊號處理電路設計。藉由所提出元件模型開發流程可快速建立感測元件模型參數，並可即時應用於電子電路界面模擬與驗證。文中並分別提出多通道橋式源極浮接與可恆壓恆流操作之多通道源極追隨組態訊號讀出電路，經量測分別可以得到53.29與36.01 mV/pH之感測靈敏度。針對ISFET溫度效應部份，分別完成臨界電壓萃取型式溫度感測器、溫度感測器讀出校正電路與訊號差分溫度補償電路設計，結合四通道橋式源極浮接組態訊號讀出模組進行量測，溫度補償前後分別可以得到7.38與0.264 mV/oC之溫度係數反應，證明所採用組態可大幅降低溫度效應對ISFET之影響。文中最後提出一可操作於1.5伏特8位元，10M Sample/s取樣率之連續電流比較方式類比/數位轉換電路，模擬結果顯示整體電路功率消耗446.5uW ，積分非線性誤差與微分非線性誤差分別為1~5LSB與-2.4~2.6LSB。

關鍵字

離子感測陣列 ； 訊號差分溫度補償 ； 生醫感測 ； 臨界電壓萃取型式溫度感測器 ； 連續電流比較方式類比/數位轉換電路 ； 巨集行為模型

並列摘要

ABSTRACT
Array sensors not only have the ability of detecting multi-signal sources but also can improve the sensing reliability due to the statistical data processing acquired from repeated and identical sensors. Therefore, to develop ISFET based array sensors become more valuable and important in biochemical related research. In order to speed the design of sensor array circuit, to develop a SPICE-compatible behavior macromodel is needed.
This thesis present the development of ISFET behavior macromodel and the signal process circuit design of sensor array. The main achievements include a HSPICE-compatible macro-model of depletion–mode Si3N4 gate ISFET, a bridge-type drain-source follower circuit and an adjustable operating point source follower interface circuit for multiple-ISFET sensing applications, and a VT extractor temperature sensor accompanied with a temperature compensation electronics are presented.
In addition, a 10M Sample/s successive current comparison mode analog-to-digital converter is presented in this thesis. The resolution of the ADC is 8-bit and operated at 1.5V. The simulation results show that the ADC consumes 446.5uW only, the INL and DNL are 1~5LSB and -2.4~2.6LSB respectively.

並列關鍵字

VT extractor temperature sensor ； ISFET based array sensors ； biochemical ； behavior Macromodel ； successive current comparison mode analog-to-digital co

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