石英音叉之製程研究

The research and design of quartz fork

林書緯(Shu-Wei Lin)

指導教授 ： 周元昉

國立臺灣大學/工學院/機械工程學研究所/碩士(2013年)

https://doi.org/10.6342/NTU.2013.02288

摘要

在石英振盪器中含有一細小的石英音叉，本論文製作的石英音叉其擁有準確的振動頻率32768赫茲，本篇論文中主要是要完成此石英音叉外型以及音叉上電極的製作。
首先簡介石英音叉的振動原理與討論光罩上的設計，使石英音叉上正背面電極能精準的控制在目標位置與側電極接通；在本製程中，若正背面電極製作後有過多的偏移則會造成與側電極短路或斷路。實驗當中會利用鉻金鍍膜來當作保護層，經由氫氟酸蝕刻等其它製程後製作出石英音叉本體以及正反面電極
側電極的部分，將使用Shadow Mask(陰影遮罩)使石英音叉之側電極鍍膜成功；Shadow Mask是一加工過後的矽晶片，經氫氧化鉀、ICP等製程製作後表面區塊部分貫穿；使用時將石英音叉放置於Shadow Mask上進行鍍膜，鍍膜粒子將會經由這些中空區塊在石英音叉側壁上形成一層金屬膜。
最後實驗為在石英音叉的側邊製作電極，即為將石英音叉置入Shadow Mask上進行側電極鍍膜，再來討論所有的製作結果以及分析如何改善問題。

關鍵字

石英音叉 ； 陰影遮罩 ； 鉻金鍍膜 ； 氫氧化鉀蝕刻 ； 側電極

並列摘要

In the quartz resonator that contains a small quartz tuning fork. The quartz fork has accurate vibration frequency of 32,768 Hz. This paper is mainly to complete the production of this quartz tuning fork shape.
In order to manufacture the electrodes of the quartz fork on the right location, this thesis will discuss the design of the pattern on the mask. The error of location will cause the short or open electrodes and make the experiment fail. Cr and Au are used as hard mask for etching from HF, and the fork and the electrodes will be manufactured in this experiment.
Shadow Mask will be applied to manufacture the side electrodes on the quartz. Shadow Mask is a silicon wafer and some parts of the structure in this wafer are removed by KOH and ICP. This experiment will put the quartz fork on the Shadow Mask during film deposition. The target material will fly across the tunnel and deposited on the quartz fork.
In the final chapter, this thesis will analyze the problems in this experiment and propose some ideas to improve it.

並列關鍵字

Quartz Fork ； Shadow Mask ； Sputter ； KOH etch ； Side eletrodes

參考文獻

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6.楊宗樺石英音叉製程之研究國立台灣大學機械工程學研究所碩士論文民國一零一年七月