以軟模翻製OADM元件

Fabrication of OADM Devices Based on Soft Lithography

林品元(Pin-Yuan Lin)

指導教授 ： 莊為群

國立虎尾科技大學/電機資訊學院/光電與材料科技研究所/碩士(2012年)

摘要

本研究以微機電製程技術製作光波導元件，並結合全像干涉微影技術及軟式模仁的翻模技術，來製作OADM元件。
實驗中先以微機電技術製作光波導，並以此波導元件利用H-PDMS封住其一波導，使其一條有光阻一條則無，之後使用全像干涉技術，再搭配軟式印刷技術製作、翻膜技術與複製成形，製作出OADM元件。此OADM元件翻膜模仁可達到大量生產的效果，並具有低成本和製作簡單之優點。
本研究中以原子力顯微鏡(Atomic Force Microscope, AFM)、掃描式電子顯微鏡(Field-Emission Scanning Electron Microscope, FE-SEM)等方法觀察其結構，在量測部分，以光波量測系統與光頻譜分析儀測量本元件之光學傳輸特性。

關鍵詞：光波導;軟式翻模技術

關鍵字

軟式翻模技術 ； OADM元件

並列摘要

In this study, the optical waveguide elements of the MEMS process technology, combined with the turning model of holographic interference lithography and soft mold technology, to make OADM components.
First experiment, the MEMS technology to produce optical waveguides and waveguide components H-PDMS to seal one of the waveguide, so that a resist a no, then using holographic interferometry, and then with a soft printing technology to produce, turned to membrane technology and replication molding, production OADM components.It is easily to achieve the mass production, easy fabrication and low cost by using technique of lift molding of polymeric Waveguide.
In order to observe and recond the result of this experiment accurately, we utilize the AFM (Atomic Force Microscopy) and SEM (Scanning Electron Microscopy).

Keywords: Soft Printing Technology;OADM Devices

並列關鍵字

Soft Printing Technology ； OADM Devices

參考文獻

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