H型長行程精密定位平台控制

The High Precision Positioning Control for H-type long-stroke stage

沈和諭(He-Yu Shen)

指導教授 ： 沈金鐘

國立虎尾科技大學/工程學院/自動化工程研究所/碩士(2010年)

https://doi.org/10.6827/NFU.2010.00023

摘要

在精密加工或精密機器中，高精密定位控制是不能缺少的核心技術。選擇一個適當的控制方法，將可使得一個機械系統獲得全面性的控制與補償。
本論文以長行程、高速運動之雙軸掃描平台，利用雙頻雷射干涉儀量測系統之光學回授建立控制系統為主要研究主題。馬達在實際運動控制上是有著參數變異、外界干擾與不確定性等因素，利用順滑模態優異的強健性與抗干擾性進行高速與高精度定位之研究，實際測試各種控制架構，如協調控制(Co-ordinated Control)、順滑模態與PID混合控制等，並分析不同架構之優劣比較，考慮兩軸之間的干涉現象，建立雙軸線性馬達掃描平台之控制系統。

關鍵字

雷射干涉儀量測系統 ； 順滑模態控制 ； 線性馬達 ； 協調控制

並列摘要

The technology of high-precision position control is essential in precision machining and machines. To choose a suitable control algorithm makes the mechanical system to obtain a comprehensive control and compensation.
In this thesis, we focus on high-speed and high-precision positioning H-type linear motor stage with optical feedback control system by the dual-frequency laser interferometer measurement system. There are parameter variation, external disturbances, uncertainties and other factors in the motor motion control system. Using the sliding mode control can reduce effects of the parameter variation and external disturbances on the system. After on-line test, we compare results of those control schemes, such as sliding mode control, PID control, and co-ordinated control. Then we set up control system with considering the interference between the dual-axis.

並列關鍵字

dual-frequency laser interferometer ； sliding mode control ； linear motor ； Co-ordinated Control

參考文獻

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